Semiconductor die package and method for making the same

ABSTRACT

Semiconductor die packages are disclosed. An exemplary semiconductor die package includes a premolded substrate. The premolded substrate can have a semiconductor die attached to it, and an encapsulating material may be disposed over the semiconductor die.

CROSS-REFERENCES TO RELATED APPLICATIONS

This patent application is a divisional of U.S. patent application Ser.No. 12/823,411, filed Jun. 25, 2010, now allowed, which is a divisionalof U.S. patent application Ser. No. 11/471,291, filed Jun. 19, 2006,(now U.S. Pat. No. 7,772,681), which is a non-provisional of and claimsthe benefit of the following U.S. Provisional Applications: 60/701,781,filed on Jul. 22, 2005; 60/696,320, filed on Jun. 30, 2005; 60/696,027,filed on Jun. 30, 2005; 60/696,350, filed on Jun. 30, 2005; 60/702,076,filed on Jul. 22, 2005; 60/696,305, filed on Jun. 30, 2005, and60/753,040, filed on Dec. 21, 2005, the disclosures of which are hereinincorporated by reference in their entirety for all purposes.

BACKGROUND OF THE INVENTION

Various semiconductor die packages are known.

While such packages are useful, they could be improved. For example,many of the above-described packages are difficult and/or expensive tomake.

Accordingly, it would be desirable to provide for improved semiconductordie packages, methods for making semiconductor die packages, componentsof such die packages, and electrical assemblies using such semiconductordie packages. Such improved semiconductor die packages would desirablybe less costly to manufacture and/or would have better functionality.

SUMMARY OF THE INVENTION

Embodiments of the invention are directed to semiconductor die packages,methods for making semiconductor die packages, and electrical assembliesincluding the semiconductor die packages.

One embodiment of the invention is directed to a method comprising:obtaining a premolded substrate including a leadframe structure and amolding material, wherein the leadframe structure includes a firstconductive portion, a second conductive portion, and an intermediateportion between the first conductive portion and the second conductiveportion; cutting the intermediate portion to electrically isolate thefirst conductive portion from the second conductive portion; attaching asemiconductor die to the substrate; and electrically coupling the firstand second conductive portions to the semiconductor die.

Another embodiment of the invention is directed to a semiconductor diepackage comprising: a premolded substrate including a leadframestructure and a molding material, wherein the leadframe structureincludes a first conductive portion, a second conductive portion, and acavity between the first conductive portion and the second conductiveportion; a semiconductor die on the premolded substrate; and anencapsulating material covering the semiconductor die and filling thecavity between the first conductive portion and the second conductiveportion.

Another embodiment of the invention is directed to a method comprising:obtaining a premolded substrate including a first surface and a secondsurface, wherein the premolded substrate includes a leadframe structureand a molding material, wherein the leadframe structure comprises a padregion, wherein an exterior surface of the pad region and an exteriorsurface of the molding material are substantially coplanar and coincidewith the second surface of the premolded substrate; and attaching atleast two semiconductor dice to the first surface of premoldedsubstrate.

Another embodiment of the invention is directed to a semiconductor diepackage comprising: a premolded substrate including a first surface anda second surface, wherein the premolded substrate includes a leadframestructure and a molding material, wherein the leadframe structurecomprises a pad region, wherein an exterior surface of the pad regionand an exterior surface of the molding material are substantiallycoplanar and coincide with the second surface of the premoldedsubstrate; and at least two semiconductor dice coupled to the firstsurface of premolded substrate.

Another embodiment of the invention is directed to a method for forminga forming a semiconductor die package, the method comprising: forming asubstrate, wherein forming a substrate comprises (i) placing a leadframestructure between at least a first molding die and a second molding die,(ii) contacting the leadframe structure with the first and secondmolding dies, and (iii) forming a molding material around the leadframestructure; attaching a semiconductor die to the substrate; andencapsulating the semiconductor die in an encapsulating material.

Another embodiment of the invention is directed to a semiconductor diepackage comprising: a substrate, wherein forming a substrate comprises aleadframe structure and a molding material, wherein the substrate formsat least one concave structure; and a semiconductor die on thesubstrate.

Another embodiment of the invention is directed to a method comprising:obtaining a substrate including a leadframe structure and a moldingmaterial, wherein a surface of the molding material and the leadframestructure are substantially coplanar, and wherein the substrate includesa first die attach region and a second die attach region; attaching afirst semiconductor die to the first die attach region; and attaching asecond semiconductor die to the second die attach region.

Another embodiment of the invention is directed to a semiconductor diepackage comprising: a substrate including a leadframe structure and amolding material, wherein a surface of the molding material and theleadframe structure are substantially coplanar, and wherein thesubstrate includes a first die attach region and a second die attachregion; a first semiconductor die on the first die attach region; and asecond semiconductor die on the second die attach region.

Another embodiment of the invention is directed to a method for making asubstrate for a semiconductor die package, the method comprising:obtaining a first leadframe structure and a second leadframe structure;attaching the first and second leadframe structure together using anadhesion layer; and applying a molding material to the first leadframestructure, the second leadframe structure, or the adhesion layer.

Another embodiment of the invention is directed to a semiconductor diepackage comprising: a premolded substrate comprising a leadframestructure and a molding material, wherein an exterior surface of theleadframe structure and an exterior surface of the molding material aresubstantially coplanar; and a semiconductor die on the premoldedsubstrate; leads attached to the premolded substrate, wherein the leadswere separately formed from the premolded substrate.

Another embodiment of the invention is directed to a method comprising:obtaining a substrate comprising a conductive die attach surface;attaching a high side transistor including a high side transistor inputto the substrate, wherein the high side transistor input is coupled tothe conductive die attach surface; and attaching a low side transistorincluding a low side transistor output to the substrate, wherein the lowside transistor input is coupled to the conductive die attach surface.

Another embodiment of the invention is directed to a semiconductordevice package comprising: a substrate comprising a conductive dieattach surface; a high side transistor including a high side transistorinput, wherein the high side transistor input is coupled to theconductive die attach surface; and a low side transistor including a lowside transistor output, wherein the low side transistor input is coupledto the conductive die attach surface.

These and other embodiments of the invention are described in furtherdetail below.

BRIEF DESCRIPTION OF THE DRAWINGS

FIGS. 1A-1H show cross-sectional views of components during theformation of a semiconductor die package according to an embodiment ofthe invention.

FIG. 1I is a bottom view of a semiconductor die package according to anembodiment of the invention.

FIG. 1J is a top plan view of an assembly of substrates duringmanufacture.

FIG. 1K is a side, cross-sectional view of a rail including a referencegroove.

FIG. 1L shows a top plan view of a substrate with cutting lines.

FIG. 2A shows a bottom view of another semiconductor die packageaccording to an embodiment of the invention.

FIG. 2B shows a side-cross-sectional view of the semiconductor diepackage shown in FIG. 2A.

FIG. 2C shows a bottom view of a leadframe structure according to anembodiment of the invention.

FIG. 2D shows a bottom view of a semiconductor die package according toanother embodiment of the invention.

FIG. 2E shows a side cross-sectional view of another semiconductor diepackage according to another embodiment of the invention.

FIGS. 3A-3C show a top plan view of a semiconductor die package as it isbeing assembled.

FIG. 3D shows a bottom plan view of a semiconductor die package.

FIG. 3E shows a side cross-sectional view of a substrate according to anembodiment of the invention.

FIGS. 4A-4C show top plan views of another semiconductor die packageaccording to an embodiment of the invention.

FIG. 4D shows a bottom plan view of a substrate according to anembodiment of the invention.

FIG. 4E shows a side cross-sectional view of a substrate according to anembodiment of the invention.

FIG. 5 shows a perspective view of a leadframe structure array.

FIGS. 6A-6I show perspective views of die packages as they are beingformed.

FIGS. 7A-7C show side cross-sectional views of another semiconductor diepackage as it is being formed.

FIG. 7D shows a perspective view of the semiconductor die package formedusing the process shown in FIGS. 7A-7C.

FIGS. 8A-8D show side cross-sectional views of another semiconductor diepackage has it is being formed.

FIG. 8E shows a perspective view of the semiconductor die package formedusing the process shown in FIGS. 8A-8D.

FIGS. 9A-9D show cross-sectional views of another semiconductor diepackage has it is being formed.

FIG. 9E shows a perspective view of another semiconductor die packageaccording to an embodiment of the invention.

FIGS. 10A-10D show cross-sectional views of another semiconductor diepackage has it is being formed.

FIG. 10E shows a perspective view of another semiconductor die packageaccording to an embodiment of the invention.

FIGS. 11A-11D show cross-sectional views of another semiconductor diepackage has it is being formed.

FIG. 11E shows a bottom perspective view of the semiconductor diepackage.

FIG. 12A-12D show cross-sectional views of another semiconductor diepackage has it is being formed.

FIG. 12E shows a bottom perspective view of the semiconductor diepackage shown in FIG. 12D.

FIG. 13A-13D show cross-sectional views of another semiconductor diepackage has it is being formed.

FIG. 13E shows a bottom perspective view of the semiconductor diepackage shown in FIG. 13D.

FIG. 14A-14D show cross-sectional views of another semiconductor diepackage has it is being formed.

FIG. 14E shows a perspective view of the semiconductor die package shownin FIG. 14D.

FIG. 15A-15D show cross-sectional views of another semiconductor diepackage has it is being formed.

FIG. 15E shows a bottom perspective view of the semiconductor diepackage shown in FIG. 15D.

FIG. 16A-16D show cross-sectional views of another semiconductor diepackage has it is being formed.

FIG. 16E shows a bottom perspective view of the semiconductor diepackage shown in FIG. 16D.

FIG. 17A-17D show cross-sectional views of another semiconductor diepackage as it is being formed.

FIG. 17E shows a bottom perspective view of the semiconductor diepackage shown in FIG. 17D.

FIG. 18A-1 is a bottom perspective view of a leadframe structure.

FIG. 18A-2 is a top perspective view of a leadframe structure that hasbeen partially etched.

FIG. 18B-1 is a bottom perspective view of a premolded substrate.

FIG. 18B-2 is a top perspective view of a premolded substrate.

FIG. 18C is a top perspective view of a premolded substrate withsemiconductor dice mounted thereon.

FIG. 18D is a top perspective view of a semiconductor die packageincluding a premolded substrate.

FIG. 19A is a top perspective view of a premolded leadframe substrateincluding semiconductor dice mounted thereon.

FIG. 19B shows a bottom perspective view of the premolded leadframesubstrate in FIG. 18A.

FIG. 20A is a top plan view of a premolded substrate according to anembodiment of the invention.

FIG. 20B shows a top perspective view of a premolded substrate accordingto an embodiment of the invention.

FIG. 20C shows a side, cross-sectional view of a premolded substrateaccording to an embodiment of the invention.

FIG. 20D is a bottom perspective view of a premolded substrate accordingto an embodiment of the invention.

FIG. 20E is a top plan view of a premolded substrate according to anembodiment of the invention.

FIG. 20F is a side, cross sectional view of a premolded substrateaccording to an embodiment of the invention.

FIG. 20G is a top perspective view of a premolded substrate according toan embodiment of the invention.

FIG. 20H is a bottom perspective view of a premolded substrate accordingto an embodiment of the invention.

FIG. 21A is a top perspective view of a frame structure.

FIGS. 21B and 21C are perspective views of premolded substratesaccording to embodiments of the invention.

FIGS. 21D and 21E show top perspective views of premolded substratesmounted in frames. Semiconductor dice are mounted on the premoldedsubstrates.

FIG. 21F shows a bottom perspective view of a premolded substratemounted in a frame.

FIG. 21G shows a side view of a premolded substrate mounted to a frame.

FIGS. 22A-22D respectively show side cross-sectional, rear perspective,top, and front perspective views of a molded die package according to anembodiment of the invention.

FIG. 23 is a circuit diagram for a synchronous buck converter thatcorresponds to the package shown in FIG. 24C.

FIG. 24A shows a side view of a semiconductor die package according toan embodiment of the invention.

FIG. 24B shows a top plan view of a semiconductor die package accordingto an embodiment of the invention.

FIG. 24C shows a perspective view of a semiconductor die packageaccording to an embodiment of the invention.

FIG. 24D is a bottom perspective view of a leadframe structure.

FIG. 24E is side perspective view of a semiconductor die packageaccording to an embodiment of the invention.

FIG. 25 shows a side view of another embodiment of the invention. Inthis embodiment, a molding material is deposited within a leadframe andisolates a chip from conductive regions of the leadframe structure.

DETAILED DESCRIPTION

Embodiments of the invention are directed to semiconductor die packagesand methods for making semiconductor die packages. A semiconductor diepackage according to an embodiment of the invention includes asubstrate, and a semiconductor die mounted on the substrate. Thesemiconductor die may at attached to the substrate using an adhesive orany other suitable attachment material. In the semiconductor diepackage, the bottom surface and/or the top surface of the semiconductordie may be electrically coupled to conductive regions of the substrate.An encapsulating material may encapsulate the semiconductor die. As willbe explained in further detail below, the substrates according toembodiments of the invention can have different configurations indifferent embodiments.

The substrate may have any suitable configuration. However, in preferredembodiments of the invention, the substrate includes a leadframestructure and a molding material. Typically, at least one surface of theleadframe structure is substantially coplanar with an exterior surfaceof the molding material. In some embodiments, both opposing majorsurfaces of the leadframe structure are substantially coplanar withopposing exterior surfaces of the molding material in the substrate. Inother embodiments, only one major surface of the leadframe structure issubstantially coplanar with an exterior surface of the molding material.

The term “leadframe structure” can refer to a structure that is derivedfrom a leadframe. Leadframe structures can be formed by, for example,stamping processes which are known in the art. An exemplary leadframestructure can also be formed by etching a continuous conductive sheet toform a predetermined pattern. Thus, in embodiments of the invention, aleadframe structure in a semiconductor die package may be a continuousmetallic structure or a discontinuous metallic structure.

A leadframe structure according to an embodiment of the invention mayoriginally be one of many leadframe structures in an array of leadframestructures that are connected together by tie-bars. During the processof making a semiconductor die package, the leadframe structure array maybe cut to separate individual leadframe structures from each other. As aresult of this cutting, portions of a leadframe structure (such as asource lead and a gate lead) in a final semiconductor die package may beelectrically and mechanically uncoupled from each other. In otherembodiments, an array of leadframe structures is not used whenmanufacturing semiconductor die packages according to embodiments of theinvention.

A leadframe structure according to an embodiment of the invention manycomprise any suitable material, may have any suitable form, and may haveany suitable thickness. Exemplary leadframe structure materials includemetals such as copper, aluminum, gold, etc., and alloys thereof. Theleadframe structures may also include plated layers such as platedlayers of gold, chromium, silver, palladium, nickel, etc.

A leadframe structure according to an embodiment of the invention mayalso have any suitable configuration. For example, the leadframestructure may also have any suitable thickness including a thicknessless than about 1 mm (e.g., less than about 0.5 mm). In addition, theleadframe structure may have a die attach region which may form a dieattach pad (DAP). Leads may extend laterally away from the die attachregion. They may also have surfaces that are and/or are not coplanarwith the surface forming the die attach region. For example, in someexamples, the leads may be bent downwardly with respect to the dieattach region.

If the leads of the leadframe structure do not extend laterally outwardpast the molding material, the substrate can be considered a “leadless”substrate and a package including the substrate could be considered a“leadless” package. If the leads of the leadframe structure extend pastthe molding material, then the substrate can be a “leaded” substrate andthe package may be a “leaded package”.

The molding material that is used in the substrate may comprise anysuitable material. Suitable molding materials include biphenyl basedmaterials, and multi-functional cross-linked epoxy resin compositematerials. Suitable molding materials are deposited in liquid orsemi-solid form on a leadframe structure, and are thereafter cured toharden them.

The semiconductor die that is mounted on the substrate may include anysuitable semiconductor device. Suitable devices may include vertical orhorizontal devices. Vertical devices have at least an input at one sideof the die and an output at the other side of the die so that currentcan flow vertically through the die. Horizontal devices include at leastone input at one side of the die and at least one output at the sameside of the die so that current flows horizontally through the die.Exemplary semiconductor devices are also described in U.S. patentapplication Ser. No. 11/026,276, filed on Dec. 29, 2004, which is hereinincorporated by reference in its entirety for all purposes.

Vertical power transistors include VDMOS transistors and verticalbipolar transistors. A VDMOS transistor is a MOSFET that has two or moresemiconductor regions formed by diffusion. It has a source region, adrain region, and a gate. The device is vertical in that the sourceregion and the drain region are at opposite surfaces of thesemiconductor die. The gate may be a trenched gate structure or a planargate structure, and is formed at the same surface as the source region.Trenched gate structures are preferred, since trenched gate structuresare narrower and occupy less space than planar gate structures. Duringoperation, the current flow from the source region to the drain regionin a VDMOS device is substantially perpendicular to the die surfaces.

An encapsulating material may be used to encapsulate the semiconductordie. The encapsulating material may comprise the same or different typeof material as the previously described molding material. In someembodiments, the encapsulating material covers or at least partiallycovers the substrate, and one or more semiconductor dice on thesubstrate. The encapsulating material may be used to protect the one ormore semiconductor dice from potential damage due to exposure to thesurrounding environment.

Any suitable process may be used to encapsulate the semiconductor die(s)and/or the substrate that supports the semiconductor dice(s). Forexample, a semiconductor die and substrate may be placed in a moldingdie, and an encapsulating material may be formed around at least part ofthe semiconductor die and/or the substrate. Specific molding conditionsare known to those of ordinary skill in the art.

I. Die Packages Including Substrates Having Cut Isolation Regions

As the feature sizes of microlead package (MLP) components get smallerand smaller, designs are constrained by metal-to-metal clearance anddimensional tolerance capabilities of etched and half-etched frametechnology. Embodiments of the invention disclose a premolded framelayout that is able to accommodate dual rows for exposed pads. A dualrow MLP has a smaller package size as compared to a single row MLP forthe same number of leads. In embodiments of the invention, a leadframestructure is premolded and is then sawed to isolate two conductive pads.

An embodiment of the invention is directed to a method includingobtaining a premolded substrate including a leadframe structure and amolding material, where the leadframe structure includes a firstconductive portion, a second conductive portion, and an intermediateportion between the first conductive portion and the second conductiveportion. The molding material in the substrate may have a thickness thatis substantially equal to a thickness of the leadframe structure. Forexample, the thickness of the molding material may be substantiallyequal to the thickness of the first conductive portion and/or the secondconductive portion.

The intermediate portion is then cut to electrically isolate the firstconductive portion from the second conductive portion. The first andsecond conductive portions may form different terminals in a diepackage. For example, the first and second conductive portions may beselected from the group consisting of a gate lead, a source lead, and adrain lead, where the first and second conductive portions aredifferent. Multiple sets of first and second conductive portions mayform rows of conductive regions.

After cutting the leadframe structure, at least one semiconductor die isattached to the substrate. A suitable adhesive or solder can be used toattach the semiconductor die to the substrate. The semiconductor die maybe of the type described above. For example, the leadframe structure maybe a semiconductor die comprising a power MOSFET.

After the semiconductor die is attached to the substrate, thesemiconductor die may be electrically coupled to the first and secondconductive portions. For example, the semiconductor die and the firstand second conductive portions may be wirebonded together.Alternatively, conductive clips can be used to electrically couple thesemiconductor die to the first and second conductive portions.

After the semiconductor die is electrically coupled to the first andsecond portions in the premolded substrate, an encapsulating materialmay be deposited over the semiconductor die to encapsulate it. Theencapsulating material may be the same or different type of material asthe above-described molding material.

The formed semiconductor die package may have leads that do not extendpast an exterior surface of the molding material. In some embodiments,the formed semiconductor die package may be referred to as a “microleadpackage” or MLP package.

Exemplary methods and die packages can be described with respect toFIGS. 1A-1L.

FIG. 1A shows a leadframe structure 14 according to an embodiment of theinvention. The leadframe structure 14 in this example is free of a dieattach pad (DAP). As will be explained below, the substrate whichincludes the leadframe structure 14 will have a die attach region formedfrom a molding material. The leadframe structure 14 has a first surface14(e) that is opposite to a second surface 14(f) of the leadframestructure 14.

The leadframe structure 14 includes a first conductive portion 14(a), asecond conductive portion 14(b), and an intermediate portion 14(c)between the first conductive portion 14(a) and the second conductiveportion 14(b). As shown, the thicknesses of the first and secondconductive portions 14(a), 14(b) are about the same, but the thicknessof the intermediate portion 14(c) is less than the thicknesses of thefirst and second conductive portions 14(a), 14(b). As a result of thesedifferent thicknesses, a gap 16 is defined by the first conductiveportion 14(a), the second conductive portion 14(b), and the intermediateportion 14(c).

The leadframe structure 14 may be formed using any suitable process. Forexample, the leadframe structure 14 may be formed using photoresist andetching processes, or stamping processes. These processes and otherprocesses are well known to those of ordinary skill in the art. Forinstance, the gap 16 shown in FIG. 1A may be formed using well knownphotolithography and etching processes. In exemplary photolithographyand etching process, a bare metal structure (not shown) can be coatedwith a layer of photoresist. This layer of photoresist can be imaged anddeveloped. Exposed regions of the metal structure may be etched using awet or dry etching process. The cavity 16 can be formed using a wet ordry etching process.

As shown in FIG. 1A, after the leadframe structure 14 is formed, a pieceof tape 12 may be attached to the first surface 14(e) of the leadframestructure 14. The piece of tape 12 covers the first surface 14(e) of theleadframe structure 14 so that the molding material that is used to formthe substrate does not cover the first surface 14(e).

As shown in FIG. 1B, after attaching the tape 12 to the first surface14(e) of the leadframe structure 14, a molding material 18, such as anepoxy molding material, can be deposited and solidified on the leadframestructure 14. The molding material 18 fills the gap 16 of the leadframestructure 14 and the interstices between the various first and secondconductive portions 14(a), 14(b). Excess molding material may be removedso that the second surface 14(f) is not covered with molding material.However, the region between the first and second surfaces 14(e), 14(f)of the leadframe structure 14 is filled with the molding material 18 inthis example.

As shown in FIG. 1B, an exterior surface 18(a) of the molding material18 may be substantially coplanar with exterior surfaces 14(a)-1, 14(b)-1of the first and second conductive portions 14(a), 14(b). As shown, thethickness of the molding material 18, at certain locations, issubstantially equal to the thickness of the first and second conductiveportions 14(a), 14(b).

As shown in FIG. 1C, after molding, a first cutting element 20 cuts theintermediate portion 14(c) of the leadframe structure 14 to thereby formone or more cavities 24 in the substrate 22. The one or more cavities 24may extend entirely through the intermediate portion 14(c) and maypartially extend into the molding material 18. The cavities 24 may beformed through half the thickness (or less) of the thickness of thesubstrate 22. By cutting the intermediate portion 14(c), the first andsecond conductive portions 14(a), 14(b) can be electrically andmechanically isolated from each other. As will be explained in detailbelow, the isolated first and second conductive portions 14(a), 14(b)may thereafter serve as separate electrical terminals (e.g., electricalbonding pads) in the resulting semiconductor die package.

Any suitable first cutting element 20 may be used to cut theintermediate portion 14(c). For example, the first cutting element 20may be a water jet, a saw, etching material, or a laser.

As shown in FIG. 1D, after cutting, a premolded substrate 22 is formed.The substrate 22 has cavities 24 where cutting was performed. Thecavities 24 uncouple the first and second conductive regions 14(a),14(b) so that they are mechanically and electrically isolated from eachother.

The formed premolded substrate 22 may or may not have leads that extendpast the lateral edges of the molding material 18. In the specificsubstrate 22, the leads of the leadframe structure 14 correspond withthe first and second conductive regions 14(a), 14(b). In otherembodiments, the substrate 22 may have leads which extend laterallyoutside of the lateral edges of the leadframe structure 14 and may ormay not be bent downwardly to form terminal connections.

As shown in FIG. 1E, one or more semiconductor dice 25 may then bemounted on the substrate 22. The substrate 22 may include a firstsurface 22(a) and a second surface 22(b) opposite to the first surface22(a). In this example, there are at least two semiconductor dice 25mounted directly on the molding material 18. Multiple semiconductor dice25 may be mounted on the substrate 22 if multiple semiconductor diepackages are to be formed. As explained below, joined packages can beformed and these can be eventually separated from each other in asingulation process.

Any suitable material may be used to mount the one or more semiconductordice 25 to the substrate 22. For example, solder, or a conductive ornon-conductive adhesive, may be used to mount the one or moresemiconductor dice 25 on the substrate 22. Suitable adhesives includefilled or unfilled epoxy adhesives.

The one or more semiconductor dice 25 may be mounted at any suitablelocation on the substrate 22. As shown in FIG. 1E, the one or moresemiconductor dice 25 are mounted to an insulating material such as themolding material 18. In other embodiments, the leadframe structure 14may include one or more conductive die attach pads (not shown) and theone or more semiconductor dice 25 may be mounted to the one or more dieattach pads.

The semiconductor dice 25 may be any of the above describedsemiconductor dice. For example, each die 25 may have a first surface25(a) and a second surface 25(b), where the second surface 25(b) iscloser to the substrate 22 than the first surface 25(a). In someembodiments, the first surface 25(a) may have a source terminal, a gateterminal, and a drain terminal, while the second surface 25(b) does nothave any terminals. In other embodiments, the first surface 25(a) mayhave a source and/or gate terminal, while the second surface 25(b) has adrain terminal (or vice-versa). In this case, the one or moresemiconductor dice 25 can be mounted on conductive die attach pads (notshown) instead of the molding material 18.

After mounting the one or more semiconductor dice 25, wires 30 may beattached to (and therefore electrically couple) electrical terminals atthe first surface 25(a) of the semiconductor dice 25 and the first andsecond conductive portions 14(a), 14(b). The wires 30 may alternativelyreferred to as “wirebonds”. The wires may be formed of a noble metalsuch as gold, silver, platinum, etc., or may include a transition metalsuch as copper, aluminum, etc. In some embodiments, the wires may be inthe form of coated wires (e.g., a copper wire coated with a noble metalsuch as gold or platinum). Alternatively or additionally, conductiveclips may be used to electrically couple the electrical terminals at thefirst surface 25(a) of the semiconductor die 25 to the first and secondconductive portions 14(a), 14(b).

Referring to FIG. 1F, an encapsulating material 32 may then be depositedon the first surface 22(a) of the substrate 22 and on the semiconductordice 25 mounted on the first surface 22(a) of the substrate 22. Theencapsulating material 32 fills the previously formed gaps 24 in thesubstrate 22. The filling of the cavities 24 in the substrate 22 by theencapsulating material 32 advantageously “locks” the encapsulatingmaterial 32 to the substrate 22. The encapsulating material 32 can alsobe molded so that it does not extend past the side edges of thesubstrate 22.

Referring to FIG. 1G, after depositing the encapsulating material 32, asecond cutting element 42 (which may be the same as or different fromthe first cutting element 20 described above) may be used to separatethe formed packages 40(a), 40(b) from each other. The second cuttingelement 42 may cut through the encapsulating material 32, and thesubstrate 22. This process may be referred to as “singulation”.

FIG. 1H shows a side cross-sectional view of a semiconductor die package40(a) according to an embodiment of the invention after singulation. Asshown in FIG. 1H, in the package 40(a), the sides of the encapsulatingmaterial 32 are co-extensive with the sides of the substrate 22. Theencapsulating material 32 also covers the semiconductor die 25 as wellas the wires 30. The first and second conductive portions 14(a), 14(b)are electrically isolated from each other and form electrical terminalsat the bottom of the package 40(a).

As shown in FIG. 1I, the first and second conductive portions 14(a),14(b) may form electrical terminals at the bottom of the package 40(a).The terminals corresponding to the first and second conductive portions14(a), 14(b) may correspond to conductive lands on a printed circuitboard (not shown).

The semiconductor die package 40(a) shown in FIG. 1I can be readilymounted on the circuit board (not shown) to form an electrical assembly.Solder can be deposited on the exposed surfaces of the first and secondconductive portions 14(a), 14(b), and/or on the corresponding conductivelands on the circuit board. The semiconductor die package 40(a) can thenbe mounted to the circuit board like a flip chip.

FIG. 1J shows a rail structure 50 that can hold many substrates 22during the package formation process. The rail structure 50 includesmany cutting reference grooves 50(a). The grooves 50(a) can be used tohelp guide the previously described first cutting element 20 so that theoptimal cutting depth can be determined before the intermediate portionbetween the first and second conductive portions is cut. The grooves50(a) may be referred to as “saw street references” in some cases.

FIG. 1K shows a side view of a reference groove 50(a) in a railstructure 50. As shown, the groove 50(a) extends through part of thethickness of the frame structure 50.

FIG. 1L shows horizontal and vertical cutting lines. These lines 62define cutting paths for the first cutting element as it cuts theintermediate portion isolating the first and second conductive portionsof the leadframe structure in the substrate 22.

When cutting is performed through the cutting lines, a saw blade, forexample, can cut through only part of the rail structures 50 so thatthey can remain intact, and the various substrates 22 can be furtherprocessed. As an alternative to using a saw and reference grooves 50(a),one can use a laser to cut the previously described intermediateportions that are present between the first and second conductiveportions. A laser beam can be used to specifically cut the intermediateportions, without using reference grooves.

The embodiments described above have a number of advantages. As notedabove, by providing a cavity in between first and second conductiveportions of a leadframe structure and then filling it with anencapsulating material, the encapsulating material can “lock” to thepremolded substrate. This helps to ensure that the formed die package issturdy and robust. Also, die packages with multiple electrical terminalscan be formed quickly and efficiently using embodiments of theinvention. In addition, embodiments of the invention can form at leasttwo rows of MLP packages with minimized package dimensions, and withoutexposed die attach pads (DAPs).

In the embodiments described with respect to FIG. 1A-1L, thesemiconductor die is inside of a region defined by the internal portionsof the leads. In other embodiments of the invention, it is possible toprovide for a semiconductor die package having a configuration wherebythe semiconductor die overlaps with portions of the leads. This type ofsemiconductor die package may also be a dual row MLP package. Theimproved dual row MLP package allows for a higher pin count given thesame package size, without sacrificing thermal performance. The improveddual row MLP package is also smaller than comparable packages with thesame number of pins without sacrificing thermal performance. Theseadditional embodiments are described with reference to FIGS. 2A-2E.

FIG. 2A shows a bottom view of a semiconductor die package 700 accordingto an embodiment of the invention. The semiconductor die package 700includes a leadframe structure 720 including a plurality of inner firstconductive portions 702(a) and a plurality of outer second conductiveportions 702(b). As shown, the second conductive portions 702(b)encircle the first conductive portions 702(a). As in the priorembodiments, a molding material 704 forms a substrate 721 with theleadframe structure 720. Exterior surfaces of the molding material 704are substantially coplanar with exterior surfaces of the first andsecond conductive portions 702(a), 702(b) of the leadframe structure720.

A side cross-sectional view of the semiconductor die package 700 isshown in FIG. 2B. FIG. 2B is a cross-sectional view along the line 2B-2Bin FIG. 2A. The semiconductor die package 700 includes a semiconductordie 710 that is mounted on a substrate 721 using a die attach material712 such as solder or a non-conductive adhesive. In this example, thebottom of the semiconductor die 710 is not electrically coupled to thefirst conductive inner portion 70(a). As in the embodiments above, thesubstrate 721 includes the molding material 704 and the leadframestructure 720, and there are cavities 703 that are formed in thesubstrate 721. The cavities 703 are between respective first and secondconductive portions 702(a), 702(b) and are formed by cuttingintermediate portions of the leadframe structure 720 that are betweenthe first and second conductive portions 702(a), 702(b). Cuttingprocesses are described above in FIGS. 1C and 1D above and any of theabove-described cutting processes can be used here.

Then, process steps including die attach, wire bonding, encapsulation,and singulation may be performed. Such process steps are described abovewith respect to FIGS. 1E to 1H. These descriptions are incorporatedherein.

Unlike the previously described package that is shown in FIG. 1G, inthis embodiment, the semiconductor die 710 is mounted on the substrate721 so that it is over and overlaps with the inner first conductiveportions 702(a), and an etched region 720(a) of the leadframe structure720. Wires 711 electrically couple the semiconductor die 710 to theupper surfaces of the first and second conductive portions 702(a),702(b).

FIG. 2C is a bottom view of the leadframe structure 720 that is used inthe substrate 721. As shown, the first and second conductive portions702(a), 702(b) are formed after etching. Intermediate portions 702(c)are between the first and second conductive portions 702(a), 702(b).Together, a first and second conductive portion 702(a), 702(b) and anintermediate portion 702(c) between the first and second portions702(a), 702(b) can form a gap. As noted above, the intermediate portion702(c) is eventually cut and is filled with an encapsulating material.The leadframe structure 720 also includes etched regions 720(a) wherematerial from the leadframe structure 720 is removed.

FIG. 2D shows a bottom view of a semiconductor die package 730 accordingto another embodiment of the invention. As in the prior embodiments, thesemiconductor die package 730 includes a leadframe structure 740 and amolding material 746. Together, these components can form a substrate741. The leadframe structure 740 includes a central portion 736 whichmay include a die attach region including a die attach pad (DAP), aswell as inner first conductive portions 732(a) and outer secondconductive portions 732(b). The second conductive portions 732(b) mayencircle the inner first conductive portions 732(a), and the first andsecond conductive portions 732(a), 732(b) may be electrically isolatedfrom each other as described above.

As shown in FIG. 2E, a semiconductor die 752 is mounted to the dieattach region of the central portion 736 using a die attach material orthe like. The semiconductor die 752 overlaps with many of the firstconductive portions 732(a) as well as the central portion 736. Each ofthe second conductive portions in the plurality of second conductiveportions 732(b) is electrically isolated from a corresponding firstconductive portion in the plurality of first conductive portions 732(b).FIG. 2E is a cross-sectional view along the line 2E-2E in FIG. 2D. Thepreviously described wires are omitted from FIG. 2E for clarity.

The embodiments described with respect to FIGS. 2A-2E have a number ofadvantages. Embodiments of the invention allow for a higher pin countwithout sacrificing thermal performance. Embodiments of the inventioncan alternatively be smaller than a comparable package with the samenumber of pins, without sacrificing thermal performance. For example, asmall package can be formed using such embodiments, even though the diethat is used in the package is relatively large. Other designs are notable to incorporate a large semiconductor die into a package withoutincreasing the size of the package. This is because in other designs,the semiconductor die is placed on a DAP (die attach pad) of comparablesize. However, in the above described embodiments, the semiconductor diecan have lateral dimensions that are larger than a DAP or may not have aDAP at all, while overlapping with at least some of the conductiveportions (leads) of the leadframe structure. Thermal performance is notsacrificed and can be improved, since heat is dissipated not onlythrough a DAP, but also through the leads (conductive portions) of theleadframe structure.

Table 1 illustrates the advantages provided by the specific embodimentsdescribed with respect to FIGS. 2A-2E, as compared to the specificembodiments described above in FIGS. 1A-1L (Embodiment 1). As shown inTable 1, the embodiments that are specifically described with respect toFIGS. 2A-2E (Embodiment 2) can be smaller, can have higher pin counts,and can have better thermal properties than the embodiments specificallydescribed in FIGS. 1A-1L.

TABLE 1 Characteristic Embodiment 1 Embodiment 2 Size (pitch) 7 mm × 6mm 6 mm × 5 mm (0.65 mm pitch) (0.4 mm-0.5 mm pitch) Pin count 56 pin 80pin Limit of pitch Min 0.5 mm Min 0.4 mm Thermal DAP not soldered withDAP not soldered with resistance— 56 pins—82.6 80 pins—78.7 single boardDAP not soldered with (degrees C/W) 64 pins—72.1 Thermal DAP notsoldered with DAP not soldered with resistance— 56 pins—45.1 80pins—35.3 multiboard DAP not soldered with (degrees C/W) 64 pins—32.8

II. Die Packages Including Multiple Semiconductor Dice

As the feature sizes of MLP (microleaded package) components get smallerand smaller, designs can be constrained by the metal to metal clearanceand dimensional tolerance capabilities of etched and half-etched frametechnologies. This brought about the introduction of bump-chip carrier(BCC) technology which currently does not offer any layout restrictions,but would typically use wet etching processes. The use of wet etchingprocesses is not preferred.

Embodiments of the invention use premolded substrates incorporatingleadframe structures. The substrates can accommodate multiplesemiconductor dice. Typically, a multichip package requires the use of adedicated substrate layout. A dedicated substrate layout is typicallyspecific only to that particular multichip package. Embodiments of theinvention are able to remove this constraint by enabling the reuse ofthe same premolded substrate design to accommodate multiplesemiconductor die layouts. An exposed pad layout can also used toenhance the thermal performance of the semiconductor die package inembodiments of the invention. Other layout concepts include the abilityof the semiconductor die package to provide access to a drain contact ofa semiconductor die (e.g., if the semiconductor die comprises a verticalpower MOSFET).

In one embodiment of the invention, a premolded substrate including afirst surface and a second surface is obtained. The premolded substrateincludes a leadframe structure and a molding material. The leadframestructure comprises a pad region. An exterior surface of the pad regionand an exterior surface of the molding material are substantiallycoplanar and coincide with the second surface of the premoldedsubstrate. At least two semiconductor dice are attached to thesubstrate. Preferably, the at least two semiconductor dice are attachedto the molding material of the substrate, and are connected to leads atthe lateral edges of the substrate using bond wires and/or conductiveclips.

FIGS. 3A to 3E show steps in the formation of a semiconductor diepackage including a premolded substrate and multiple semiconductor dice.

FIG. 3A shows a top view of a premolded substrate 100 according to anembodiment of the invention. The premolded substrate 100 comprises amolding material 102 and a leadframe structure 104. At least an externalsurface of the molding material 102 and an external surface of theleadframe structure 104 are substantially coplanar. The leadframestructure 104 includes a number of leads 104(a) that are at andterminate at the outer lateral edge regions of the substrate 100. Theleads 104(a) in this example are present at each of the four side edgeregions of the substrate 100, and are exposed through and do not extendpast a molding material 102. Exterior surfaces of the leads 104(a) canbe substantially coplanar with the exterior surface of the moldingmaterial 102.

As shown by the dotted lines in FIG. 3A, the leadframe structure 104includes a downset central region that is inside of the leads 104(a).The downset central region may be formed by a partial etching process.The top surface of the downset central region is covered with themolding material 102.

The upper surface of the molding material 102 can form a die attachregion 100(a) where two or more semiconductor dice (not shown) can bemounted. Since the upper surface of the molding material 102 is used asa die attach region 106 and no conductive die attach pads are used asmounting surfaces in the illustrated embodiment, the premolded substrate100 can support multiple semiconductor dice without requiring that thosedice be in a particular layout. Several multi-die configurations can beused without changing the external lead layout.

Referring to FIG. 3B, after the substrate is formed, semiconductor dice110, 112, 114 are mounted on the die attach region 106 of the substrate100. A non-conductive (or conductive) adhesive can be used to attach thesemiconductor dice 110, 112, 114 to the die attach region 106. Thesemiconductor dice can be any of the semiconductor dice described above.Advantageously, the dice 110, 112, 114 can be placed on the moldingmaterial 102 of the substrate 100 in any suitable arrangement.

Referring to FIG. 3C, after the semiconductor dice 110, 112, 114 aremounted to the substrate 100, the top surfaces of the semiconductor dice110, 112, 114 can be electrically coupled to the leads 104(a) to form asemiconductor die package 121. If desired, an optional encapsulatingmaterial may be deposited and cured over the semiconductor dice 110,112, 114 as well as any conductive structures (e.g., wires, clips, etc.)that are used to couple the leads 104(a) to the top surfaces of thesemiconductor dice 110, 112, 114.

FIG. 3C specifically shows a number of wirebonds 118 coupling electricalterminals (not shown) at the top surfaces of the semiconductor dice 110,112, 114 to the lateral leads 104(a) of the leadframe structure 104. Thewirebonds 118 can be formed by wirebonding processes, which are wellknown in the art. As an alternative, conductive clips and solder couldbe used to couple the electrical terminals at the top surface of thesemiconductor dice 110, 112, 114 to the leads 104(a).

FIG. 3D shows a bottom view of the substrate 100. The bottom of thesubstrate 100 and the leadframe structure 104 includes a pad region104(b) which is opposite the die attach region 106. The pad region104(b) is large and occupies a major portion of the second surface100(b) of the substrate 100, and is downset with respect to the leads104(a) at the edges of the substrate 100. In this example, the exposedpad region 104(b) can occupy at least about 50% of the lateral area ofthe substrate 100. The large pad region 104(b) provides the formedpackage with good heat transfer characteristics as the large pad region104(b) of the leadframe structure 104 acts has a heat sink.

FIG. 3E shows a side, cross-sectional view of the substrate 100 alongthe line 3E-3E in FIG. 3A. The pad region 104(b) has an exterior surface104(b)-1, which occupies a substantial portion of the bottom surface ofthe substrate 100. The exterior surface 104(b)-1 of the pad region104(b) is exposed by and is substantially coplanar with an exteriorsurface 102(a) of the molding material in the substrate 100. In thisexample, the molding material 102 electrically isolates thesemiconductor dice 110, 112, 114 from the pad region 104(b). The exposedpad region 104(b) can be soldered to a circuit board (not shown) ifdesired to provide a thermal path from the semiconductor dice 110, 112,114 to the circuit board.

As shown in FIG. 3E, the leads 104(a) have thicknesses which aresubstantially equal to the maximum thickness of the molding material102. In addition, in the substrate 100, an internal surface of the padregion 104(b) of the leadframe structure 104 is covered by the moldingmaterial 102. The molding material 102 has a thickness “T” and in thisexample, the combined thickness T and the thickness of the pad region104(b) equals the thickness of the substrate 100.

The embodiments described with respect to FIGS. 3A-3E have a number ofadvantages. First, the large exposed pad region 104(b) improves thethermal performance of the formed semiconductor die package by providinga large heat conduction path from the semiconductor dice 110, 112, 114.In addition, the large die attach region 106 of the substrate 100 doesnot have conductive pads so that various multi-die layouts can beprovided in a package, even though only one substrate design is used.

FIGS. 4A-4F illustrate a process for forming another embodiment of theinvention.

FIG. 4A shows another premolded substrate 100 according to an embodimentof the invention. The substrate 100 includes a leadframe structure 104including a pad region 104(b) and leads 104(a), and a molding material102. A die attach region 106 at an upper surface 100(a) of the premoldedsubstrate 100 can include a surface of the pad region 104(b) and cansupport a number of semiconductor dice (not shown). The dotted lines inFIG. 4B show the outline of the leadframe structure 104, and theleadframe structure 104 may be formed by a partial etching process.

Unlike the substrate 100 described above with reference to FIG. 3A, inthis example, the pad region 104(b) has opposing surfaces which coincidewith the opposing surfaces of the substrate 100. In this embodiment, thedie attach region 106 includes both an exterior surface of the padregion 104(b) and an exterior surface of the molding material 102.

In this example, the pad region 104(b) extends through the entirethickness of the substrate 100, and may provide for a conductive and/orthermal path for a semiconductor die (not shown) on the pad region104(b) through the substrate 100 and to an underlying circuit board (notshown). In some embodiments, the pad region 104(b) may be electricallycoupled to an input or output terminal of an electrical device in asemiconductor die (not shown in FIG. 4A. For example, the pad region104(b) may be electrically coupled to the drain region of a MOSFET in asemiconductor die.

As shown in FIG. 4B, a number of semiconductor dice 110, 112, 114 can beplaced on the die attach region 106. One of the semiconductor dice,semiconductor die 112, may be attached to the pad region 104(b), whilethe other semiconductor dice 110, 114 may be attached to moldingmaterial 102. The semiconductor die 112 could be a vertical device suchas a vertical MOSFET. As described above, such vertical devices have aninput at one surface of the die and an output at another oppositesurface of the die. The other semiconductor dice 110, 114, may includehorizontal devices. As noted above, a horizontal device has an input andan output at the same surface of the die.

Referring to FIG. 4C, after the semiconductor dice 110, 112, 114 aremounted to the substrate 100, a number of wirebonds 118 are formed toconnect the leads 104(a) to the upper surfaces of the semiconductor dice110, 114, 112. A semiconductor die package 121 is then formed.

FIG. 4D shows a bottom view of the substrate 100. As shown in FIG. 4D,the exposed surface of the pad region 104(b) is larger at the bottomsurface 100(b) of the substrate 100 than the exposed surface of the padregion 104(b) at the top surface 100(a) of the substrate 100. In otherembodiments, the exposed surface of the pad region 104(b) at the topsurface 100(a) of the substrate 100 can be larger or the same size asthe exposed surface of the pad region 104(b) at the bottom surface ofthe substrate 100.

FIG. 4E shows a side view of the substrate 100 shown in FIG. 4A. Asshown in FIG. 4E, first and second opposing surfaces 104(b)-1, 104(b)-2of the pad region 104(b) are substantially coplanar with exteriorsurfaces of the molding material 102. The molding material 102 may havea thickness “T” at an etched portion of the pad region 104(b). Thus, themolding material 102 can have a thickness that is equal to the thicknessof the substrate 100 at some locations and can have the thickness “T” atother locations.

The embodiments described with respect to FIGS. 4A-4E have a number ofadvantages. First, the large exposed pad region 104(b) improves thethermal performance of the formed semiconductor die package by providinga large heat conduction path from the semiconductor dice 110, 112, 114.In addition, the large die attach region 106 of the substrate 100 canserve as a conductive and thermal path for one or more semiconductordice mounted on the substrate 100.

The embodiments shown in FIGS. 3A-3E and 4A-4E have other advantages inaddition to those already mentioned above. First, since a DAP is notrequired, many different semiconductor die configurations can be used,without changing external lead configurations. The clearance betweendice on the substrate can be minimized, since a DAP is not requiredthereby providing for a more compact package. Second, since a DAP is notrequired, a tie bar that is used to connect to the DAP during processingis not required. This can simplify processing. Third, the area occupiedby an area associated with an exposed pad in a substrate according to anembodiment of the invention can be maximized. As shown above, theexposed pad can occupy almost the entire backside of the substrate thatsupports the semiconductor dice. Fourth, as shown above, the leadframestructure can have an exposed surface in the substrate to connect to thedrain or other terminal in an electrical device in a semiconductor diethat is mounted on the substrate. This can be done while maximizing theexposed pad area at the opposite side of the substrate, which iseventually soldered to an appropriate circuit board.

III. Method of Manufacturing a Semiconductor Die Package Using a StampedLeadframe Structure

Some of the premolded substrate embodiments described above use anetched leadframe structure (e.g., the embodiments described with respectto FIGS. 1A-1H) and are formed using expensive cover tape. Using etchedleadframes and cover tape is expensive. Tape is a relatively expensivecomponent in the manufacturing process, and the taping and etchingprocesses increase the manufacturing time, complexity, and cost of apremolded substrate. It would be desirable to provide for a process forforming a premolded substrate that does not rely on the use of covertape or etched leadframe structures.

To address these problems, embodiments of the invention can use astamped leadframe structure apparatus to form a premolded substrate.Cover tape and etched leadframes are not needed to form the premoldedsubstrate so that the final package that is produced is less expensivethan a package that is formed using an etched leadframe and cover tape.Because of the processing efficiencies achieved using embodiments of theinvention, the resulting semiconductor die packages produced accordingto embodiments of the invention can cost about 42% less than comparablesemiconductor die packages using premolded substrates with etchedleadframe structures.

In addition to addressing the above noted problems, it would also bedesirable to improve the thermal performance of semiconductor diepackages including premolded substrates. In embodiments of theinvention, thermal performance is good, because heat can be transmittedfrom a semiconductor die to the leads of a leadframe structure.

It would also be desirable, in some cases, to increase the area of asolder joint that is used to attach a semiconductor die package to acircuit board. Using embodiments of the invention, a concave structurecan be formed in the substrate. With a concave structure, it is possibleto increase the size of a solder joint and an exposed pad can beprotected from possible electrical shorting. This is explained infurther detail below.

Embodiments of the invention can also use flip chip attachment methodsusing a non-conductive adhesive or a solder bump and reflow process. Theleadframe structure design is relatively simple, and it is also possibleto increase the pin count for a given package size. It is also possibleto use a larger die in the semiconductor die package, since a DAP (dieattach pad) is not required in embodiments of the invention.

In one embodiment, the method comprises forming a premolded substrate.The step of forming the premolded substrate comprises (i) placing aleadframe structure between at least a first molding die and a secondmolding die, (ii) contacting the leadframe structure with the first andsecond molding dies, and (iii) forming a molding material around theleadframe structure. The leadframe structure may be a non-etchedleadframe structure, and the first and second molding dies may form partof a molding apparatus or tool. After the premolded substrate is formed,a semiconductor die is attached to the premolded substrate. Wirebonds,conductive clips, solder structures (e.g., solder balls) or the like canbe used to electrically couple the semiconductor die to leads in thepremolded substrate. After the semiconductor die is electrically andmechanically coupled to the premolded substrate, the semiconductor dieis then encapsulated in an encapsulating material to form asemiconductor die package. The encapsulating material may be the same ordifferent than the previously described molding material. For example,the encapsulating material may be different than the previouslydescribed molding material to improve the thermal performance of theformed die package and to decrease manufacturing costs.

In a specific embodiment, the method for forming a semiconductor diepackage can use the following processes: a) a first molding process toform a premolded substrate, b) a substrate cleaning process which mayuse a plasma, laser, or chemical etching and/or deflash process, c) adie attach process, d) a plasma cleaning process, e) a wire bondingprocess, e) a second molding or encapsulation process, and f) asingulation process. Each of these specific processes is described infurther detail below.

FIG. 5 shows a leadframe structure array 201 including a number joinedleadframe structures 200. Each leadframe structure 200 in the leadframestructure array 201 includes uncut leads 200(b) and a major region200(a). The uncut leads 200(b) extend on opposite sides of the majorregion 200(a). The leadframe structures 200 in the leadframe structurearray 201 will eventually be used in individual semiconductor diepackages and will eventually be separated from each other. The leadframestructures 200 and the leadframe structure array 201 may have any of thecharacteristics or features of any of the above described leadframestructures.

FIG. 6A shows a perspective view of a molded leadframe structure array206 after it is formed in a mold tool 202. The mold tool 202 includes afirst molding die 202(a) and a second molding die 202(b). An inlet forintroducing an unsolidified molding material and fluid outlet for excessmolding material may be provided in the mold tool 202. In some cases,heating elements (not shown) may also be provided to heat the moldingmaterial so that it can flow. In general, mold tools are well known inthe art.

To form the molded leadframe structure array 206, the previouslydescribed leadframe structure array 201 can be inserted between thefirst and second molding dies 202(a), 202(b). A molding material 204 isformed around the leadframe array structure 200 and solidifies to form amolded leadframe structure array 206. The molding material 204 exposesexternal surfaces of the leads 200(b) and the major regions 200(a). Aslightly raised rim structure 204(a) may be present around each majorregion 200(a). Some exterior surfaces of the molding material 204 andthe leadframe structures in the leadframe structure array 200 aresubstantially coplanar with each other.

The mold tool 202 has two mold dies 202(a), 202(b) which can haveappropriate configurations to shape the molding material 204 in adesired manner. The top mold 202(b) can have surfaces that are in directcontact with the major regions 200(a), surfaces of the uncut leads200(b), and any other surfaces that are not supposed to be covered withthe molding material. By using the molding dies 202(a), 202(b), it isnot necessary to use expensive cover tape or etched leadframe structureswhen forming a premolded substrate. This reduces the cost of thepremolded substrate, and therefore the semiconductor die package that isformed from the premolded substrate. This also reduces the number ofsteps needed to form the molded portion of the premolded substrate, thussaving processing time and expense. Lastly, using molding dies 202(a),202(b), it is possible to form a rim of molding material around a majorregion 200(a) thereby forming a concave structure.

As shown in FIG. 6B, a cleaning process can be used to increase theadhesion of an encapsulation material to the molding material 204 andthe exposed leads 200(b). Any suitable cleaning process can be used. Forexample, a plasma cleaning process, a laser cleaning process, a chemicaletching process, a mechanical deflash process, etc. can be used.Suitable cleaning process parameters may be determined by those ofordinary skill in the art. FIG. 6B specifically shows a cleaningapparatus 216 as it cleans the upper surface of the molded leadframearray 206.

As shown in FIG. 6C, after the molded leadframe array 206 is cleanedwith the cleaning apparatus 216, an adhesive 218 (or solder of the like)can be deposited on the exterior surfaces of the major regions 200(a)using an adhesive deposition apparatus 217. The adhesive 218 maycomprise any suitable commercially available adhesive including an epoxyadhesive. The adhesive 218 may be filled or unfilled, and may or may notinclude a conductive material.

As shown in FIG. 6D, after the adhesive 218 is deposited on the majorregions 208(a), one or more semiconductor dice 226 are mounted on themajor regions 200(a). The semiconductor die 226 that is electricallycoupled to each major region 200(a) can be positioned over and mayoverlap with the leads 200(b). However, the semiconductor die 226 may beelectrically isolated from the leads 200(b), due to the presence of therim of molding material 204(a). Because the semiconductor die 226 canactually be positioned over a portion of the leads 200(b), the size ofthe semiconductor die 226 is not limited to the size of the majorregions 200(a). This allows for the incorporation of largersemiconductor dice in the semiconductor die packages according toembodiments of the invention.

Also as shown in FIG. 6D, wirebonds 228 are then formed betweenelectrical terminals (not shown) at the topside of the semiconductordice 226 and the leads 200(b). In other embodiments, instead ofwirebonds 228, conductive clips can be used to electrically andmechanically couple the leads 200(b) to the upper surfaces of thesemiconductor dice 226.

As shown in FIG. 6E, the resulting assembly is then overmolded with anencapsulating material 230 to form an overmolded assembly 232. FIG. 6Eshows a top, perspective view the overmolded assembly 232.

Any suitable molding process may be used to form the overmolded assembly232. For example, a molding tool with molding dies can be used to formthe overmolded assembly. As in prior embodiments, the encapsulatingmaterial 230 may be the same or different than the molding material usedto form the premolded substrate in the semiconductor die package.

FIG. 6F shows a bottom, perspective view of the opposite side of theovermolded assembly 232 shown in FIG. 6F. As shown, there can be secondrims 204(b) of molding material around the bottom surfaces of the majorregions 208(a) of the leadframe structures. As will be explained infurther detail below, these can form concave structures.

FIG. 6G shows the overmolded assembly 232 including a molding material230 as it is being marked with a laser 238, or other suitable markingelement. The overmolded assembly 232 includes a number of joinedsemiconductor die packages. After marking, the joined packages can besingulated with an appropriate cutting element (not shown) to separatethe formed packages from each other. Suitable cutting elements includelasers, saws, punching apparatuses, or the like.

FIG. 6H shows a top, perspective view of a formed package 246, whileFIG. 6I shows a bottom, perspective view of the formed package 246. Asshown in FIG. 6I, the second rim 204(b) and the exposed surface of themajor region 208(b) can form concave structure. The concave structurecan contain solder (not shown) and can be flipped over and then mountedto a printed circuit board. The concave structure can be used to confinesolder to a particular location, and the second rim 204(b) of moldingmaterial may form a barrier between solder attached to the major region204(b) and the leads 200(b). As shown, the lateral edges of the leads200(b) are substantially coplanar with and do not extend past thelateral surfaces of the molding material 204. The bottom surfaces of theleads 200(b) are also substantially coplanar with the surfaces of themolding material 204 that is between the leads 200(b).

FIGS. 7A-7D show side views of a semiconductor die package as it isbeing processed. The method shown in FIGS. 7A-7D is similar to theprocess shown in FIGS. 6A-6I.

FIG. 7A shows a leadframe structure 302 including a first surface 302(a)and a second surface 302(b) opposite the first surface 302(a). In thisexample, the leadframe structure 302 has a number of spaces 303 that arepresent between the leads 305, and a major central portion 333 of theleadframe structure 302. The major central portion 333 is presentbetween sets of leads 305. The leadframe structure 302 may have the sameor different characteristics as the leadframe structures describedabove. For example, the leadframe structure 302 may comprise a materialsuch as copper and may be plated.

FIG. 7B shows a leadframe structure 302 after a molding material 302 hasbeen formed on it. This may constitute a first molding process. Apremolded substrate 301 is thereafter formed. The molding material 302has two portions 304(a), 304(b), which may form a rim of moldingmaterial 304. As shown in FIG. 7B, a concave structure 307 is formed bythe molding material portions 304(a), 304(b), and the bottom surface ofthe major central portion 333 of the leadframe structure.

As shown in FIG. 7C, after the premolded substrate 301 is formed, asemiconductor die 310 is attached to the premolded substrate 301 usingan adhesive 308, which may include a conductive or non-conductiveadhesive, solder, etc. The semiconductor die 310 may comprise ahorizontal or vertical device as described above. If a vertical deviceis present, then the adhesive may 308 may be conductive so that currentcan pass to or from the bottom surface of the die 310 to the adhesive308, the major central portion 333 of the leadframe structure 302, andto an appropriate pad on a circuit board (not shown).

Then, wirebonds 314 are formed between the leads 305 of the leadframestructure 302 and electrical terminals (not shown) at the upper surfaceof the semiconductor die 310. The upper surface of the semiconductor die310 may be further from the premolded substrate 301 than the oppositesurface of the semiconductor die 310. An encapsulating material 318 isthen formed over the semiconductor die 310 and the wirebonds 314. Asshown in FIG. 7C, the lateral surfaces of the encapsulating material 318may be coplanar with the lateral surfaces of the leads 305 of theleadframe structure 302.

A bottom perspective view of the resulting semiconductor die package 330is shown in FIG. 7D. The semiconductor die package 330 includes anencapsulating material 318 and a leadframe structure 302. A rim ofmolding material 304 is disposed around the major central portion 333 ofthe leadframe structure 302 to form a concave structure 301. As shown,the regions between the leads of the leadframe structure 302 are filledwith the molding material 304 and the surfaces of the molding material304 at those locations are substantially coplanar with the surfaces ofthe leads.

Other semiconductor die packages according to embodiments of theinvention can include premolded substrates without concave structures.Such embodiments can be described with reference to FIGS. 8A-8E.

FIG. 8A shows another side, cross-sectional view of a leadframestructure 320 including a gap 321. The leadframe structure 320 alsoincludes a first surface 320(a) and a second surface 320(b), and leads324 on opposite sides of the gap 321.

FIG. 8B shows the leadframe structure 320 after a molding process isperformed. This may constitute a first molding process. As shown in FIG.8B, a molding material 322 is disposed within the gap 321 and exteriorsurfaces of the molding material 322 are substantially coplanar with thefirst and second surfaces 320(a), 320(b) of the leadframe structure 320.The resulting premolded substrate 363 has first and second opposingsurfaces 363(a), 363(b), which coincide with the exterior surfaces ofthe molding material 322 and the first and second surfaces 320(a),320(b) of the leadframe structure 320. Unlike the substrate shown inFIG. 7B, no concave structure is formed in the premolded substrate 363that is shown in FIG. 8B.

As shown in FIG. 8C, a semiconductor die 328 is mounted on the substrate363 using an adhesive 344 after the substrate 363 is formed. In thisexample, the semiconductor die 328 may comprise an upper surface withelectrical terminals, where the electrical terminals form part of ahorizontal device in the semiconductor die 328. The adhesive 344 may bean epoxy adhesive or any other suitable type of adhesive, and may befilled or unfilled.

After mounting the semiconductor die 328 to the substrate 363, wirebonds329 are formed between the leads 324 of the substrate 363 and the uppersurface of the semiconductor die 328. As an alternative, conductiveclips could be used in other embodiments of the invention.

As shown in FIG. 8D, after the wirebonds 329 are formed between the topsurface of the semiconductor die 328 and the leads 324, an encapsulatingmaterial 332 is formed over the semiconductor die 328 to form asemiconductor die package 330. This may constitute a second moldingprocess. In this example, the encapsulating material 332 does not extendpast the outer edges of the substrate 363. As in prior embodiments, theencapsulating material 332 may be the same or different than the moldingmaterial 322.

FIG. 8E shows a bottom perspective view of the semiconductor die package330 shown in FIG. 8D. As shown in FIG. 8E, the bottom surface of thesemiconductor die package 330 is flat. The bottom surfaces of the leads324 are substantially coplanar with the bottom surfaces of the moldingmaterial 322.

FIG. 9A shows another side, cross-sectional view of a leadframestructure 320 including a gap 321. The leadframe structure 320 alsoincludes a first surface 320(a) and a second surface 320(b), and leads324 on opposite sides of the gap 321.

FIG. 9B shows the leadframe structure 320 after a molding process hasbeen performed. As shown, the formed molding material 322 fills the gap321 and covers part of the second surface 320(b) of the leadframestructure 320 to form a substrate 363. However, the molding material 322in this example does not cover the first surface 320(a) of the leadframestructure 320.

Referring to FIG. 9C, after the substrate 363 is formed, a semiconductordie 328 is attached to the substrate 363 using an adhesive 344.Wirebonds 329 are formed between the upper surface of the semiconductordie 328 and the leads 324 of the leadframe structure 320 in thesubstrate 363. As in prior embodiments, conductive clips could be usedin place of wirebonds 329.

Referring to FIG. 9D, after the semiconductor die 328 is attached to thesubstrate 363, an encapsulating material 332 is formed over thesubstrate 363 and the semiconductor die 328 to form a semiconductor diepackage 330. As shown, the leads 324 of the leadframe structure 320 donot extend past the encapsulating material 332.

FIG. 9E shows a bottom, perspective view of a semiconductor die package330 in FIG. 9D. As shown, the molding material 322 protrudes from thesecond surface 320(b) of the leadframe structure 320.

FIG. 10A shows another side, cross-sectional view of a leadframestructure 320 including a gap 321. The leadframe structure 320 alsoincludes a first surface 320(a) and a second surface 320(b), and leads324 on opposite sides of the gap 321.

As shown in FIG. 10B, a molding material 322 fills the gap 321 of theleadframe structure 320 and also covers part of the first surface 320(a)of the leadframe structure 320, to form a premolded substrate 363. Themolding material 322 does not cover the second surface 320(b) of theleadframe structure 320 in this example.

As shown in FIG. 10C, a semiconductor die 328 is mounted on thesubstrate 363 using an adhesive 344. Wirebonds 329, or the like, may beformed to couple electrical terminals (not shown) at the upper surfaceof the semiconductor die 328 to the leads 324 of the leadframe structure320 of the substrate 363.

As shown in FIG. 10D, an encapsulating material 332 covers thesemiconductor die 328 to the leads of the substrate 363 to form asemiconductor die package 330. As shown, the bottom surface of thesemiconductor die package 330 is flat.

FIG. 10E shows a bottom, perspective view of the semiconductor diepackage 330 is shown in FIG. 10D.

FIG. 11A shows another side, cross-sectional view of a leadframestructure 320 including a gap 321. The leadframe structure 320 alsoincludes a first surface 320(a) and a second surface 320(b), and leads324 on opposite sides of the gap 321.

FIG. 11B shows a side, cross-sectional view of a substrate 363 aftersubjecting the leadframe structure 320 to a molding process. Thesubstrate 363 includes a molding material 322 which fills the gap 321and covers part of the first and second surfaces 320(a), 320(b) of theleadframe structure 320.

FIG. 11C shows the mounting of a semiconductor die 328 on the substrate363 using an adhesive 344. Wirebonds 329, or the like, are formedbetween the upper surface of the semiconductor die 328 and the leads 324of the substrate 363.

As shown in FIG. 11D, an encapsulating material 332 is then formed overthe substrate 363 and the semiconductor die 328 to form a semiconductordie package 330. As shown, the molding material 322 protrudes past thebottom surfaces of the leads 324.

FIG. 11E shows a bottom, perspective view of the semiconductor diepackage 330 shown in FIG. 11D. As shown, the exterior surface of themolding material 322 that is between the leads 324 and the exteriorsurfaces of the leads 320 are substantially coplanar. However, thecentral portion of the molding material 322 between the opposite sets ofleads 324 is raised with respect to the exterior surfaces of the leads320.

FIG. 12A shows another side, cross-sectional view of a leadframestructure 320 including gaps 321. The leadframe structure 320 alsoincludes a first surface 320(a) and a second surface 320(b). Leads 324are on opposite sides of the gaps 321. A major central portion 333 isbetween the gaps 321.

FIG. 12B shows the leadframe structure 320 in FIG. 12A after a moldingprocess is performed. As shown, a molding material 322 is formed withinthe gaps 321, and on at least a portion of the second surface 320(b) ofthe leadframe structure 320 to form a premolded substrate 363 accordingto an embodiment of the invention. The molding material 322 includes afirst portion 322(a) and a second portion 322(b). The first portion322(a), the second portion 322(b), and the major central portion 333 ofthe leadframe structure 320 between the first and second portions322(a), 322(b) can form a concave structure 337.

As shown in FIG. 12C, a semiconductor die 328 is mounted on thesubstrate 363 using an adhesive 344. The surface of the substrate 363upon which the semiconductor die 328 is mounted is flat. Then, wirebonds329 (or the like) are formed between the leads 324 of the substrate 363and any electrical terminals at the upper surface of the semiconductordie 328.

As shown in FIG. 12D, after the semiconductor die 328 is mounted on thesubstrate 363, an encapsulating material 332 is formed on the substrate363 and over the semiconductor die 328 to form a semiconductor diepackage 330.

FIG. 12E shows a bottom, perspective view of the semiconductor diepackage 330 shown in FIG. 12D. As shown in FIG. 12E, the moldingmaterial 322 includes a rim of molding material 322 that surrounds andforms a concave structure with the major portion 333 of the leadframestructure 320.

The embodiments described with respect to FIGS. 6-12 have wirebonds orthe like to connect electrical terminals at a surface of a semiconductordie, opposite to the premolded substrate mounting surface, to leads inthe premolded substrate. FIGS. 13-17 illustrate that embodiments of theinvention may be used with a flip chip type die to form a flip chip typesemiconductor die package.

FIG. 13A shows another side, cross-sectional view of a leadframestructure 340 including a gap 339. The leadframe structure 340 alsoincludes a first surface 340(a) and a second surface 340(b). Leads 366are on opposite sides of the gap 339.

FIG. 13B shows the leadframe structure 340 in FIG. 13A after it has beensubjected to a molding process to form a premolded substrate 349. Asshown therein, the molding material 342 fills the gap 339, but does notextend past the first and second surfaces 340(a), 340(b) of theleadframe structure 340. The resulting premolded substrate 349 hasopposing planar surfaces.

FIG. 13C shows a semiconductor die 346 including a number of solderbumps 348. The solder bumps 348 may be coupled to electrical terminalsin a semiconductor device in the semiconductor die 346.

The solder bumps 348 may comprise any suitable solder material includingPb—Sn solder, Pb-free solder, etc. As an alternative, conductive columnscomprising a conductive material such as copper may be used in place ofor in addition to the solder bumps 348.

As shown in FIG. 13C, the semiconductor die 346 is mounted on thepremolded substrate 349 using an adhesive 344. The adhesive 346 may bedeposited on the substrate 349 using any suitable process includinglaminating, roller coating, doctor blade coating, etc. Any suitableadhesive including an epoxy adhesive may be used.

FIG. 13D shows the formed semiconductor die package 350 after thesemiconductor die 346 is mounted to the substrate 349. As shown, theadhesive 344 fills the space between the semiconductor die 346 and thepremolded substrate 349, and may lie partially outside the periphery ofthe semiconductor die 346. In the semiconductor die package 350, thesolder bumps 348 electrically couple terminals (not shown) in thesemiconductor die 346 to the leads 366 of the leadframe structure 340.

Although FIGS. 13C and 13D show an adhesive being deposited on asubstrate first and then mounting a semiconductor die 346 on thesubstrate 349, it is understood that other embodiments are possible. Forexample, it is possible to first mount the semiconductor die 346 to thesubstrate 349, and then fill the space between the semiconductor die 346and the substrate 349 with an underfill material. Underfill materialsare commercially available. In other embodiments, an underfill materialor an additional adhesive may not be needed, since the solder 348couples the semiconductor die 346 to the premolded substrate 349.

FIG. 13E shows a bottom, perspective view of the semiconductor diepackage 350 shown in FIG. 13D. As shown, the bottom surface of thesemiconductor die package 350 coincides with the second surface 340(b)of the leadframe structure 340. At the bottom of the semiconductor diepackage 350, the exterior surface of the leadframe structure 340 issubstantially coplanar with the exterior surface of the molding material342.

FIG. 14A shows another side, cross-sectional view of a leadframestructure 340 including a gap 339. The leadframe structure 340 alsoincludes a first surface 340(a) and a second surface 340(b). Leads 366are on opposite sides of the gap 339.

FIG. 14B shows the leadframe structure 340 after it has been subjectedto a molding process. The molding material 342 fills the gap 339 andcovers at least a portion of the second surface 340(b) of the leadframestructure 340 to form a premolded substrate 349. The first surface340(a) is not covered by the molding material 342 in this embodiment.

FIG. 14C shows a semiconductor die 346 including solder bumps 348 beingmounted on the substrate 349 with an adhesive 344. As in the priorembodiment, the solder bumps 348 penetrate the adhesive layer 344 tocontact the leadframe structure 340. As in the prior embodiments, thesolder bumps 348 can comprise any suitable solder including Pb—Sn,Pb-free solder, etc. Conductive columns could be used in addition to orin place of solder.

FIG. 14D shows the semiconductor die package 350 after the semiconductordie 346 is mounted on the substrate 349. FIG. 14E shows a bottom,perspective view of the semiconductor die package 350 shown in FIG. 14D.As shown in FIGS. 14D and 14E, the molding material 342 protrudesdownward from the second surface 340(b) of the leadframe structure 340.As shown in FIG. 14E, the molding material 342 that is between adjacentleads 366 is substantially coplanar with the exterior surfaces of theleads 366.

FIG. 15A shows another side, cross-sectional view of a leadframestructure 340 including a gap 339. The leadframe structure 340 alsoincludes a first surface 340(a) and a second surface 340(b). Leads 366are on opposite sides of the gap 339.

FIG. 15B shows the leadframe structure 340 after it has been subjectedto a molding process. The molding material 342 fills the gap 339 anddoes not cover the first surface 340(a) or the second surface 340(b) ofthe leadframe structure 340.

FIG. 15C shows the semiconductor die 346 as it is being mounted on thesubstrate 349. Like the prior embodiments, the semiconductor die 346 hasa number of solder bumps 348 attached to terminals (not shown) in thesemiconductor die 346.

As shown in FIG. 15D, after the semiconductor die 346 is mounted to thepremolded substrate 349, an encapsulating material 352 may be formedover and under the semiconductor die 346 to form a semiconductor diepackage 350. The encapsulating material 352 may use the same ordifferent type of material than the previously described moldingmaterial 342.

FIG. 15E shows a bottom, perspective view of the semiconductor diepackage 350. As shown, the exterior surface of the molding material 342is substantially coplanar with the bottom, exterior surfaces of theleads 366.

The semiconductor die package 350 can be flipped over and mounted to acircuit board. If desired, solder may be formed on the exposed surfacesof the leads 366 prior to mounting the semiconductor die package 350 onthe circuit board.

Unlike the prior embodiments, an adhesive layer is not present on thesubstrate 349 prior to mounting the semiconductor die 346 on thesubstrate 349. Instead, the encapsulating material 350 covers both thetop and bottom surfaces of the semiconductor die 346.

FIG. 16A shows another side, cross-sectional view of a leadframestructure 340 including a gap 339. The leadframe structure 340 alsoincludes a first surface 340(a) and a second surface 340(b). Leads 366are on opposite sides of the gap 339.

FIG. 16B shows the leadframe structure 340 after it has been subjectedto a molding process. The molding material 342 fills the gap 339 andcovers at least a portion of the second side 340(b) to form a premoldedsubstrate 349.

FIG. 16C shows the semiconductor die 346 as it is being mounted on thepremolded substrate 349. The semiconductor die 346 includes a pluralityof solder bumps 348. The solder bumps 348 contact the leads 366 aftermounting.

As shown in FIG. 16D, after the semiconductor die 346 is mounted to thesubstrate 349, an encapsulating material 352 may be formed over andunder the semiconductor die 346 to form a semiconductor die package 350.

FIG. 16E shows a bottom, perspective view of the semiconductor diepackage 350 shown in FIG. 16D. As shown, the molding material 342 thatis between adjacent leads 366 is substantially coplanar with exteriorsurfaces of those leads 366. A larger portion of the molding material342 protrudes from the leads 366.

FIG. 17A shows another side, cross-sectional view of a leadframestructure 340 including at least two gaps 339. The leadframe structure340 also includes a first surface 340(a) and a second surface 340(b). Amajor central portion 333 is between the gaps 339. Leads 366 extendoutwardly from the gaps 339.

FIG. 17B shows the leadframe structure 340 after it has been subjectedto a molding process. As shown in FIG. 17B, the molding material 342fills the gaps 339 and covers at least a portion of the second surface340(b) to form a premolded substrate 349. The molding material 342includes a first portion 342(a) and a second portion 342(b), which alongwith a second of the major central portion 333 of the leadframestructure 340 forms a concave structure 351.

FIG. 17C shows the semiconductor die 346 as it is being mounted on thesubstrate 349. The semiconductor die 346 includes a number of solderstructures 348 attached to its underside. The solder structures 348electrically couple electrical terminals in the semiconductor die 348 tothe leads 366 of the leadframe structure 340.

As shown in FIG. 17D, after the semiconductor die 346 is mounted to thesubstrate 349, an encapsulating material 352 may be formed over andunder the semiconductor die 346 to form a semiconductor die package 350.

FIG. 17E shows a bottom, perspective view of the semiconductor diepackage 350 shown in FIG. 17D. As shown in FIG. 17E, a rim of moldingmaterial 342 is formed around the major central portion 333. Together,they can form a concave structure.

The embodiments described with reference to FIGS. 5-17 provide for anumber of advantages. First, the semiconductor die packages can beproduced less expensively, since expensive cover tape and etchedleadframe structures are not needed to create a semiconductor diepackage. In these embodiments, an etched leadframe structure and covertape are not needed to form a premolded substrate, since a molding toolwith molding dies is used to form the premolded substrate. In someinstances, this can reduce the cost of a semiconductor die package by42% when compared to semiconductor die packages that are produced usingexpensive cover tape. Second, as shown by many of the foregoingembodiments, the semiconductor die packages can use larger semiconductordice. As illustrated above, the size of the semiconductor dice need notbe constrained to the size of the die attach pads in the leadframestructures that are used in the substrates. Third, in embodiments of theinvention, it is possible to increase the pin lead count, withoutincreasing the size of the semiconductor die package. Fourth, when aconcave structure is formed, it is possible to increase solder jointreliability. The concave structures can contain solder that is used toattach the formed semiconductor die packages to printed circuit boardsor the like.

IV. Design and Method of Manufacture of a High Power Module

High power modules are used in a number of electronics applications.Some high power modules are “smart” power modules. These power modulesinclude at least one power semiconductor die and at least one controlsemiconductor die. The control semiconductor die (e.g., a driverintegrated circuit or driver chip) may be used to at least partiallycontrol the operation of the power semiconductor die.

Additional embodiments of the invention are directed to high powermodules and methods for making high power modules. In one embodiment, asubstrate including a leadframe structure and a molding material isobtained. A surface of the molding material and the leadframe structureare substantially coplanar. The substrate includes a first die attachregion and a second die attach region. A first semiconductor die isattached to the first die attach region, and a second semiconductor dieis attached to the second die attach region. The first semiconductor diemay comprise a power transistor. The second semiconductor die maycomprise be a control chip (or driver IC or driver integrated circuit).Additional power transistors and additional electronic components mayalso be present in the high power module.

FIG. 18A-1 shows a leadframe structure 402 including a first die attachregion 402(b)-1, a second die attach region 402(b)-2, and a third dieattach region 402(b)-3. The spaces between the various die attachregions 402(b)-1, 402(b)-2, 402(b)-3 may be defined by the voltagerequirements of the package to be formed.

The leadframe structure 402 also includes a number of leads 402(a)extending away from the first, second, and third die attach regions402(b)-1, 402(b)-2, 402(b)-3. In this example, the leads 402(a) extendaway from the first, second, and third die attach regions 402(b)-1,402(b)-2, 402(b)-3 in a single direction. In other examples, they mayextend away from the various die attach regions in more than onedirection. In this example, the third die attach region 402(b)-3 maycorrespond to a die paddle for a driver semiconductor die while theother die attach regions 402(b)-1, 402(b)-2 may correspond to diepaddles for power semiconductor dice.

FIG. 18A-2 shows the reverse side of the leadframe structure 402. Theleadframe structure 402 includes a first half-etched region 402(c)-1 anda second half-etched region 402(c)-2. In embodiments of the invention,the etched regions may be formed by partially etching through thethickness of a leadframe structure. A “half-etched” structure may referto a portion of a leadframe structure that has been formed after abouthalf of the thickness of the leadframe structure is removed.

The half-etched regions 402(c)-1, 402(c)-2 may be formed using astandard etching process. For example, the surfaces corresponding to thehalf-etched regions 402(c)-1, 402(c)-2, prior to etching, may be coveredwith a material such as a photoresist or tape (e.g., polyimide tape).Then, an etching material (e.g., a liquid etchant or dry etchant) may beused to etch the regions of the leadframe structure 402 not covered bythe covering material. Referring to both FIGS. 18A-1 and 18A-2, in thisexample, the first half-etched region 402(c)-1 and the first die attachregion 402(b)-1 may be part of the same structure. Also, in thisexample, the second half-etched region 402(c)-2 and the second dieattach region 402(b)-2 may also be part of the same structure.

FIG. 18B-1 shows the leadframe structure 402 after a molding process isperformed. After a molding process (e.g., a transfer molding process) isperformed, a molding material 404 is formed around the leadframestructure 402, thereby forming a premolded substrate 405. In oneexemplary transfer molding process, surfaces of the leadframe structure402 that are not intended to be covered by a molding material may becovered with tape (e.g., polyimide tape) to prevent mold bleeding duringmolding. After the leadframe structure 402 is covered with tape, amolding material may be deposited on the leadframe structure 402. Thetape is subsequently removed thus exposing the previously coveredportions of the leadframe structure 402 through the molded moldingmaterial. In other embodiments, as noted above, premolded substrates canbe formed using mold tools without using cover tape.

As shown, the molding material 404 is formed so that exterior surfacesof the molding material 404 are substantially coplanar with the exteriorsurfaces of the first, second, and third conductive die attach regions402(b)-1, 402(b)-2, 402(b)-3. As shown in FIG. 18B-1, leads 402(a)extend away from one lateral edge of the molding material 404. In otherembodiments, the leads extending from the conductive die attach regions402(b)-1, 402(b)-2, 402(b)-3 may extend away from two or more lateraledges of the molding material 404.

FIG. 18B-2 shows a bottom, perspective view of the premolded substrate405. As shown, the exterior surfaces of the first and second half-etchedregions 402(c)-1, 402(c)-2 are exposed through the molding material 404.

The premolded integrated leadframe structure according to embodiments ofthe invention have lower warpage and higher rigidity as compared to someconventional substrates. As will be apparent from the description below,in embodiments of the invention like SIP (system in a package) modules,there is no need for an extra heat sink or a substrate like a directbonded copper or insulated metal substrate. The thermal performance ofthe semiconductor die package can be achieved by using leadframestructures with appropriate thicknesses. The electrical circuitry of thepremolded substrate can be defined during the molding operation.

As shown in FIG. 18C, first, second, and third semiconductor dice408(a), 408(b), 408(c) are attached to the substrate 405 using anadhesive or some other suitable material. As in prior embodiments, anepoxy type adhesive, or any other suitable commercially availableadhesive may be used to attach the semiconductor dice 408(a), 408(b),408(c) to the premolded substrate 405.

As in the previously described embodiments, wirebonds (not shown) mayalso be formed between the leads 402(a) and the terminals at the uppersurfaces of the semiconductor dice 408(a), 408(b), 408(c) if desired.Wirebonds may also be used to connect the different semiconductor diceto each other. For example, the semiconductor die 408(b) may be a driverIC die while the semiconductor dice 408(a), 408(c) may be power IC dice.The driver IC die may be electrically coupled to and may control thepower IC dice via wires. In other embodiments, other conductivestructures such as conductive clips can be used instead of wirebonds.

As shown in FIG. 18D, an encapsulating material 410 is formed over thefirst, second, and third semiconductor dice 408(a), 408(b), 408(c) toform a semiconductor die package 400. The encapsulating material 410 maybe formed using a standard molding process. In the exemplarysemiconductor die package 400, leads 402(a) extend away from only oneside of the encapsulating material 410.

After performing the encapsulation process, the formed package can betrimmed and formed to appropriate dimensions.

FIGS. 19A and 19B show views of an SPM (smart power module) type packagethat can be made using the same general process flow that is describedwith respect to FIGS. 18A-D.

FIG. 19A shows a perspective view of a frame structure 502 that servesas a frame for a substrate 504 including a leadframe structure. FIG. 19Bshows a bottom view of the frame structure 502 and the substrate 504.First and second semiconductor dice 506(a), 506(b) are on the substrate504. As described previously, the substrate 504 is formed using aleadframe structure 504(a) and a molding material 504(b). As in theprior embodiments, portions of the leadframe structure 504(a) may bepartially etched and the molding material 504(a) have exterior surfacesthat are substantially coplanar with the exterior surfaces of themolding material 504(a).

As described above, embodiments of the invention can have half orpartially etched leadframe structures having pre-defined die paddles forpower and driver IC semiconductor dice. The isolation spacing betweenthe die attach paddles can be controlled by the voltage requirements ofthe semiconductor die packages. In addition, the leadframe structuresmay be pre-molded and the leadframe structures may be backcoated withtape to prevent mold bleeding during molding. Also, the exterior surfaceof the molding material may be substantially coplanar with the exteriorsurfaces of the die attach paddles in the premolded substrate

As noted above, the pre-molded integrated leadframe substrate has alower warpage and higher overall panel rigidity than other substrates.In addition, there is no need for an extra heat sink or substrate like adirect bonded copper or insulated metal substrate since the thermalperformance of the package can be achieved using leadframe structureswith different thicknesses. Thicker leadframe structures can be used ifbetter heat transfer is desired. In embodiments of the invention, asub-assembly panel can be molded to a final package dimension and thefinal package can then be trimmed and formed.

The semiconductor die packages that are described above can be highthermal efficiency packages and can be used in packages such as LCD(liquid crystal display) TV module packages.

V. Substrates for High Power Modules

Other embodiments of the invention are directed to premolded substratesfor semiconductor die packages, methods for making the premoldedsubstrates, and semiconductor die packages including the premoldedsubstrates.

In one embodiment, a first leadframe structure and a second leadframestructure are obtained. Then, the first and second leadframe structuresare attached together using an adhesion layer. Then, a molding materialis applied to the first leadframe structure, the second leadframestructure, or the adhesion layer.

FIG. 20A shows a top plan view of a substrate 700 according to anembodiment of the invention. FIG. 20B shows a top perspective view ofthe substrate 700 shown in FIG. 20A. In this example, the top surface ofthe substrate 700 includes four conductive regions 752, which areseparated and bordered by insulating regions 754. The insulating regions754 comprise a molding material which fills gaps 758 between theconductive regions 752. The conductive regions 752 may serve asconductive die attach regions. The four conductive regions 752 may partof a single leadframe structure. When the gaps between the fourconductive regions 752 are filled with a molding material, the moldingmaterial has exterior surface substantially coplanar with the exteriorsurfaces of the conductive regions 752. This combination can form apremolded substrate as described above.

FIG. 20C shows a side, cross-sectional view of the substrate 700 shownin FIGS. 20A, 20B. As shown in FIG. 20C, the substrate 700 includes two,half-etched leadframe structures 702 facing each other. The two,half-etched leadframe structures 702 may comprise copper, a copperalloy, or any other suitable conductive material. The two, half-etched(or partially etched) leadframe structure 702 can be formed from two10-20 mil thick leadframe structures, that have each been partiallyetched to a thickness of about 5-10 mils at certain locations. In otherembodiments, the leadframe structures 702 can have thicknesses of about20-40 mils and can be half-etched to thicknesses of about 10-20 mils atcertain locations. The leadframe structures 702 preferably have the samethicknesses and configurations. However, this is not necessary in allinstances.

Each leadframe structure 702 may be present in a premolded substrate.The premolded substrates and their corresponding leadframe structures702 are laminated to and contact an adhesive layer 704, which isdisposed between the leadframe structures 702. After lamination, asandwich composite is formed.

The adhesive layer 704 may have any suitable form and may have anysuitable thickness. For example, the thickness of the adhesive layer 704may be about 1-3 mils in some embodiments. Also, the adhesive layer 704may be in the form of a continuous or a discontinuous layer.

The adhesive layer 704 may comprise any suitable material which can bondthe previously described premolded substrates and leadframe structure702 together. For example, the adhesive layer 704 may comprise apolymeric layer such as a polyimide layer (polyimide tape). In otherembodiments, it is possible to use an FR4 laminate or high K adhesivefilm to reduce any CTE (coefficient of thermal expansion) mismatchbetween the adhesive layer 702 and the leadframe structures 702, and anyinterface shear stress if the formed premolded substrate is particularlylarge.

The leadframe substrate 702 and adhesive layer laminate that is formedmay be symmetrical to reduce potential warpage issues. For example, asshown in FIG. 20C, the regions 702(a) formed by the previously describedpartial etching process can face inwardly toward each other in theformed substrate 700. The two leadframe substrates 702 may also havesymmetrical etched patterns and similar geometries so that they aresymmetrically disposed in the substrate 700.

The sandwich laminate is further pre-molded with a molding material 706that is formed around the edges of the leadframe structures 702. Themolding material 706 may comprise an epoxy molding material or any othersuitable type of molding material. A transfer molding process or otherprocess can be used to form the molding material 706 around the edges ofthe leadframe structures 702 and the corresponding premolded substrates.For instance, the sandwich laminate may be disposed between two moldingdies and the molding material may be molded as shown using well knownmolding processes. The molding material 706 reduces free edge stress atthe interfaces of the formed laminate.

After overmolding the sandwich laminate with the molding material 706,the surfaces of the conductive regions 752 may be further processed ifdesired. For example, if the exposed conductive regions 752 at the topof the substrate 724 are to be used as conductive die attach regions forpower IC semiconductor dice, then the exposed surfaces of the conductiveregions 752 may be plated or otherwise coated with an underbumpcomposite such as Ni/Pd/Au, or other metallic layers. Such additionallayers may form a solderable pad for soldering semiconductor dice to theconductive regions 752. In another example, if the exposed surfaces ofthe conductive regions 752 are supposed to be insulated, then theexposed top surfaces of the conductive regions 752 may be anodized. Anysuitable known anodization process may be used.

FIG. 20D is a bottom perspective view of the substrate 700 described inthe previous Figures.

The substrates 700 and 710 can be manufactured in a panel form as in MLPtype packages, and then singulated using, for example, a wafer saw, andthen used in subsequent assemblies. As will be described in furtherdetail below, such embodiments can be constructed using common leadframestructures for flexible module assembly. SIP (single in line packages)can also be formed using such embodiments.

Other embodiments are possible. In the previously described embodimentsin FIGS. 20A-20D, leadframe structures are partially etched and themmolding processes are performed to form premolded substrates. Thepremolded substrates have leadframe structures with exterior surfacesthat are substantially coplanar with the exterior surfaces of themolding material. The premolded substrates are then laminated togetherwith an adhesive layer to form a sandwich composite. The resultingsandwich composite is then edge molded to form a substrate.

However, in other embodiments, it is possible to obtain two partiallyetched leadframe structures and then laminate them together with anadhesive layer, without first forming premolded substrates. Then, thelaminated leadframe structures can then be molded with a moldingmaterial to form a substrate that has the same general configuration aspreviously described.

Although the use of two partially etched leadframe structures have beendescribed in detail, it is understood that two or more etched leadframestructures can be combined to form a combination substrate according toan embodiment of the invention.

FIGS. 20E-20H illustrate other substrates according to other embodimentsof the invention.

FIG. 20E shows a top plan view of a substrate 710 according to anembodiment of the invention. The substrate 710 includes a leadframestructure 712 (e.g., a copper leadframe structure) and a moldingmaterial 714, which fills the interstices of the leadframe structure712. Thus, a thick copper leadframe structure can be premolded with amolding material such as an epoxy molding material to electricallyisolate metal pads in the substrate 712.

FIGS. 20F, 20G, and 20H respectively show side cross-sectional, topperspective, and bottom perspective views of the substrate 710. As shownin FIG. 20F, the thickness of the molding material 714 is substantiallyequal to the thickness of the leadframe structure 712. The edges of theleadframe structure 712 are also bordered by the molding material 714 sothat the molding material forms the outer edge of the substrate 710.

In embodiments of the invention, the previously described substrates700, 710 can be used independently in semiconductor die packages. As inprior embodiments, semiconductor dice may be mounted to the substrates.If desired, input and output connections can be formed between themounted semiconductor dice and the substrate and/or external inputand/or output sources. The formed packages can then be mounted to acircuit board.

In other embodiments, however, substrates 700, 702 of the typepreviously described, can be mounted to frame structures to provide thesubstrates 700, 702 with external leads. These embodiments are shown inFIGS. 21 and 22 and are described in further detail below.

FIG. 21A shows a frame structure 550 including a frame portion 550(a)and a number of leads 550(b). A central region 550(c) can receive asubstrate according to an embodiment of the invention.

Any suitable substrate may be placed in the central region 550(c). Forexample, the substrates that can be received in the central region550(c) may be the substrate 710 shown in FIG. 20E or the substrate 700shown in FIG. 20C. FIG. 21B shows a top view of a specific substrate 552that can be placed in the central region 550(c) of the frame structure550. FIG. 21C shows a bottom perspective view of the substrate 552 shownin FIG. 21B.

As shown in FIGS. 21D and 21E, a number of semiconductor dice 554 may bemounted to the substrate 552 before or after the substrate 552 isattached to the frame structure 550. As described above, any suitableconductive adhesive may be used to attach the semiconductor dice 554 tothe substrate 552. In addition, the semiconductor dice may have any ofthe characteristics that are described above. For example, at least oneof the semiconductor dice 554 may include a driver IC semiconductor diewhile at least one of the semiconductor dice 554 may include a power ICsemiconductor die. After the semiconductor dice 554 are mounted to thesubstrate 554, a semiconductor die assembly 560 is thereafter formed.

As shown, the substrate 552 including the semiconductor dice 554 may beattached to the leads 550(b) of the frame structure 550. The bottomsurfaces of the leads 550(b) may be soldered or otherwise adhered to thetop, conductive surfaces of the substrate 552.

In an alternative embodiment, the substrate 552 may be attached to theleads 550(b) of the frame structure 550 without semiconductor dice 554.After the substrate 552 is attached to the leads 550(b) of the framestructure 550, the semiconductor dice 554 may be mounted on thesubstrate 552.

FIG. 21F shows a bottom perspective view of the semiconductor dieassembly 560. FIG. 21G shows a side, cross-sectional view of asemiconductor die assembly 560.

After the semiconductor die assembly 560 is formed, an encapsulatingmaterial 576 may be formed over the semiconductor dice 554. FIG. 22Ashows a side, cross-sectional view of the semiconductor die package 577.In this example, the semiconductor die package 577 is a single in linepackage (SIP). FIGS. 22B, 22C, and 22D show top perspective, top plan,and top perspective views of the semiconductor die package 577. Theresulting package can be a high thermal efficiency package and can besued in an LCD TV module package.

It is understood that the above-described technique could be used toform a dual in-line package (DIP) as well. To form a dual in linepackage, the previously described frame structure 550 would have twosets of leads facing inward towards the central region 550(c). Both setsof leads would then be attached to the substrate (with or withoutsemiconductor dice mounted thereon), and then the resulting assemblywould be encapsulated as described above to form a DIP typesemiconductor die package.

The above-described embodiments have a number of advantages overconventional structures. For example, compared to direct bonded copper(DBC) substrates, embodiments of the invention are less expensive,because DBC substrates require the use of expensive base materials andhigh processing temperatures. Also, in a DBC substrate, the thermalmismatch between copper and ceramic in the DBC can induce high interfacestress and can induce package reliability issues. In addition, the highprocessing temperatures needed to form DBC substrates can create higherpanel warpage.

Thermal clad boards are another type of substrate. They use acombination of aluminum (1-1.5 mm), dielectric (50-80 microns), copper(35-400 microns), and electroless nickel (3-5 microns).

Embodiments of the invention have a number of advantages over thermalclad boards. For example, compared to thermal clad boards, embodimentsof the invention require fewer layers and are therefore less costly tomanufacture. In addition, thermal clad boards have a higher thermalresistance than embodiments of the invention and can have more CTEmismatch issues. Thermal mismatch can generate high interfacial stressand can induce package reliability issues.

Lastly, as shown above, embodiments of the invention can be constructedwith a common leadframe structure for flexible module assembly.

VI. System in a Package Including a Voltage Regulator

Many of the above described embodiments relate to the formation and useof premolded substrates in semiconductor die packages. The foregoingsemiconductor die package embodiments are directed to specificconfigurations for power semiconductor die packages. The semiconductordie packages may be used with power supplies and/or voltage regulators.The embodiments that are described below may use any of the premoldedsubstrates described above, or any other suitable substrate that cansupport one or more semiconductor dice.

As the demand for broadband applications increases, the designrequirements of microprocessors become more complex. This has caused CPUclock frequencies to rise and this has resulted in an increase in powerconsumption. In general, voltage regulators are designed with thefollowing requirements in mind: (1) the voltage regulator has a highresponse, operates at a reduced voltage, and accommodates high currentlevels (e.g., from a 1.3V and 70 A output to a 0.8V and 150 A output);and (2) the voltage regulator has increased efficiency at higherswitching frequencies to keep any potential losses at low levels.

To create a voltage regulator combining high frequency andhigh-efficiency operation, it is desirable to improve each of theindividual devices incorporated into the power MOSFETs and also toreduce the parasitic inductance of the wiring between the devices. Byintegrating a driver IC and high and the low-side power MOSFETs into asingle package, a substantial increase in efficiency can be achievedwith significant miniaturization.

Conventional packages for synchronous buck converters or the liketypically have three die paddles, one for each of a driver IC, a highside MOSFET die, and a low side MOSFET die. In the conventional package,the high side MOSFET source is connected to a low side MOSFET drain withbond wires. This creates high parasitic inductance. In addition, inconventional packages, the connection of the driver IC to the high sideand low side MOSFET gate, source and drain is also performed using bondwires. Using individual paddles requires the use of longer bond wires.Such factors reduce the high-frequency power efficiency and thermalperformance of conventional packages. In general, multi-die paddlepackages have a lower package reliability level than embodiments of theinvention.

A synchronous buck converter can use a driver IC, a high-side powerMOSFET and a low-side power MOSFET. FIG. 23 shows a simplified schematicdiagram of a typical synchronous buck converter. Synchronous buckconverter (SBC) 670 includes a high-side metal oxide semiconductor fieldeffect transistor (MOSFET) 672 and a low-side MOSFET 674. The drain D ofthe low-side MOSFET 674 is electrically connected to the source S of thehigh-side MOSFET 672. Most commercially produced MOSFETs are verticaldevices, and are packaged such that the external points of connection tothe gate, drain, and source are on the same geographic plane of thedevice.

The connection between the source S and the drain D of the high andlow-side MOSFETs 672 and 674, respectively, in SBC 670, desirably havevery low inductance in order for the SBC 670 to be used at moderate tohigh operating/switching frequencies. Where MOSFETs 672 and 674 areconfigured as discrete devices, the design of the circuit layout of SBC670 is desirably optimized to reduce parasitic inductances.Alternatively, SBC 670 can be configured as a fully-integratedsynchronous buck converter in a single converter in a single package andwhich is designed and laid out to reduce parasitic inductances in theconnection between the source S and the drain D of the high and low-sideMOSFETs 672 and 674, respectively. Such fully integrated devices,however, tend to be fairly application and/or design specific devicesthat are often not compatible with other applications and/or designs.Further, the printed circuit board traces/conductors that connect theMOSFETs are typically not well-suited to carrying moderate to highlevels of current.

In embodiments of the invention, a new dual common paddle package (e.g.,a 9×5 mm-26-pin dual side flat, no-lead package) can overcome problemswith conventional packages. Embodiments of the invention can have thefollowing characteristics:

-   -   A driver IC, a high side MOSFET, and a low side MOSFET may share        the same paddle.    -   The high side MOSFET may be flip chip attached to the die        paddle, while the low side MOSFET can use conventional a        conventional soft solder die attach material.    -   The source of the high side MOSFET is thus automatically        connected to the drain of the low side MOSFET though the die        attach paddle.    -   The drain of the high side MOSFET can be connected to external        pins with one or more metal strip clip bonds or one or more wire        bonds.    -   The driver IC can also be seated between the high and low side        MOSFET to reduce wire lengths.    -   The driver IC uses a non-conductive die attach material to        isolate it from the MOSFETs.    -   The packages according to embodiments of the invention have a        smaller footprint (e.g., 70%) and a smaller pin count (e.g., 26)        as compared to conventional packages such as 8×8 QFN packages.

One exemplary method according to an embodiment of the inventionincludes obtaining a substrate comprising a conductive die attachsurface, and attaching a high side transistor including a high sidetransistor input to the substrate. The high side transistor input iscoupled to the conductive die attach surface. A low side transistorincluding a low side transistor output is also attached to thesubstrate. The low side transistor input is coupled to the conductivedie attach surface.

FIG. 24A shows a side, cross-sectional view of a semiconductor diepackage 600 according to an embodiment of the invention. Thesemiconductor die package 600 has a low side transistor 606, a high sidetransistor 602, and a control die 604 mounted on a substrate 610.

FIG. 24B shows a top plan view of the semiconductor die package 600shown in FIG. 24A. FIG. 24C shows a perspective view of thesemiconductor die package 600 shown in FIG. 24A. Referring to both FIGS.24B and 24C, the semiconductor die package 600 has a low side transistordie 606, a high side transistor die 602, and a control die 604 mountedon a substrate 610. The high side transistor in the high side transistordie 602 and the low side transistor in the low side transistor die 606can be power transistors such as vertical power MOSFETs. Vertical powerMOSFET dice are described in further detail above.

In this example, the substrate 610 includes high side source leads610(c), a high side gate lead 610(h), a conductive die attach surface610(g), low side source leads 610(a), and control leads 610(b). Thesubstrate 610 may be a pre-molded substrate, as described above, may bea single, conductive leadframe structures, or may be some other suitablestructure. The conductive die attach surface 610(g) may occupy the partof the surface of the substrate 610 or the entire upper surface of thesubstrate 610.

There can be a number of connections to the high side MOSFET die 602.For example, a drain clip 612 is attached to the drain region in thehigh side MOSFET die 602. A number of solder structures 622(a) may beused to electrically and mechanically couple the drain region in thehigh side MOSFET die 602 to the drain clip 612. One or more drain wiresmay be used instead of, or in addition to the drain clip 612 in thisexample.

As shown in FIG. 24B, the gate region in the high side MOSFET die 602 iscoupled to a gate lead 610(h). A solder structure 622(b) may couple thegate lead 610(h) to the gate region in the high side MOSFET die 602. Thesource region in the high side MOSFET die 602 is coupled to theconductive die attach surface 610(g). Solder (not shown) may also beused to electrically couple the source region in the high side MOSFETdie 602 to the conductive die attach surface 610(g).

There can also be a number of connections to the low side MOSFET die606. For example, source wires 616(a) can couple the source region inthe low side MOSFET die 606 to the source leads 610(a) of the substrate610. As an alternative, one or more source clips could be used in placeof or in addition to the source wires 616(a). The source wires 616(a)may comprise copper, gold, or any other suitable material. The gateregion of the low side MOSFET die 606 is coupled to the control chip 604using a wire 616(c).

The drain region of the low side MOSFET die 606 is coupled to theconductive die attach surface 610(g) of the substrate 610, though aconductive die attach material such as solder or the like. Lead-based,or non-lead based solder can be used to attach the drain region of thelow side MOSFET die 606 to the die attach surface 610(g).

The control chip 604 is also mounted on the conductive die attachsurface 610(g) of the substrate 610, but may be electrically isolatedfrom the substrate 610. A number of bonding wires 616(e) may coupleterminals in the control chip 604 to control leads 610(b). A wire 602(d)may also couple a terminal in the control chip 604 to the conductive dieattach surface 610(g). In some cases, conductive clips could be usedinstead of bond wires.

FIG. 24D shows a bottom view of the substrate 610. As shown in FIG. 24D,the bottom of the substrate 610 may have a half-etched portion 610(i).

FIG. 24E shows a perspective view of the semiconductor die package 600.

FIG. 25 shows a side, cross-sectional view of a substrate 610 accordingto another embodiment of the invention. The substrate 610 includes arecess 690 that is filled with a molding material 692. A control chip604 is on top of the molding material 692. The molding material 692electrically isolates the control chip 604 from the conductive portionsof the substrate 610. As in prior embodiments, a low side MOSFET die 606and a high side MOSFET die 602 are on the substrate 610.

The recess 690 may be formed by etching, milling or the like. Themolding material 692 may be deposited in the recess and thensubsequently cured or solidified.

The embodiment shown in FIG. 25 has a number of advantages. For example,the molding material 692 electrically isolates the control chip 604 fromthe high and low side dice 602, 606, without increasing the height ofthe formed semiconductor die package.

The embodiments that are described above have a number of advantages.Such advantages include a smaller footprint, and better thermal andelectrical performance. Such embodiments can be used in a variety ofpackage configurations including single in line packages, and dual inline packages.

Any of the above-described embodiments and/or any features thereof maybe combined with any other embodiment(s) and/or feature(s) withoutdeparting from the scope of the invention. For example, although systemin a package type modules are not specifically described with respect tothe embodiments shown in FIGS. 1-2, it is understood that suchembodiments may be used for system in a package type modules withoutdeparting from the spirit and scope of the invention.

The above description is illustrative and is not restrictive. Manyvariations of the invention will become apparent to those skilled in theart upon review of the disclosure. The scope of the invention should,therefore, be determined not with reference to the above description,but instead should be determined with reference to the pending claimsalong with their full scope or equivalents.

Any reference to positions such as “top”, “bottom”, “upper”, “lower”,etc. refer to the Figures and are used for ease of illustration and arenot intended to be limiting. They are not intended to refer to absolutepositions.

The semiconductor die packages described above may be used in anysuitable electrical apparatus. For example, they may be used in personalcomputers, server computers, cell phones, appliances, etc.

A recitation of “a”, “an” or “the” is intended to mean “one or more”unless specifically indicated to the contrary.

All patents, patent applications, publications, and descriptionsmentioned above are herein incorporated by reference in their entiretyfor all purposes. None is admitted to be prior art.

What is claimed is:
 1. A semiconductor die package comprising: apremolded substrate including a leadframe structure and a moldingmaterial, wherein the leadframe structure includes a first conductiveportion, a second conductive portion, and an intermediate portionbetween the first conductive portion and the second conductive portion,and wherein the intermediate portion includes a cavity that electricallyisolates the first conductive portion and the second conductive portion;a semiconductor die on the premolded substrate; and an encapsulatingmaterial covering the semiconductor die and filling the cavity betweenthe first conductive portion and the second conductive portion.
 2. Thesemiconductor die package of claim 1 wherein the semiconductor diecomprises a power MOSFET.
 3. The semiconductor die package of claim 1wherein the semiconductor die comprises a vertical device.
 4. Thesemiconductor die package of claim 1 wherein the semiconductor die has afirst surface distal to the substrate and a second surface proximate tothe substrate, wherein the package further includes wirebondselectrically coupling the first surface of the die to the substrate. 5.The semiconductor die package of claim 1 wherein the semiconductor dieis directly over an insulated portion of the substrate.
 6. Thesemiconductor die package of claim 1 wherein the semiconductor diepackage does not have leads extending laterally away from theencapsulating material.
 7. The semiconductor die package of claim 1wherein the cavity was formed by cutting the intermediate portion. 8.The semiconductor die package of claim 1 wherein the cavity was formedby cutting the intermediate portion using a saw, a laser, or a waterjet.
 9. The semiconductor die package of claim 1 wherein the attachedsemiconductor die overlaps with at least a portion of the firstconductive portion.
 10. The semiconductor die package of claim 1 whereinthe leadframe structure further comprises a conductive central portioninside of a region defined by a plurality of first conductive portions.